MaN adhesion

jim kruger jimkruger at yahoo.com
Wed Oct 22 13:35:19 PDT 2008


My experience was that MaN does not like HMDS at all.

  A plasma treatment just before spin was much more effective.  O2 strip or Ar sputter.  Equipment to use depends on if you are "golden" or CMOS clean.

jim


--- On Wed, 10/22/08, James Conway <jwc at snf.stanford.edu> wrote:

> From: James Conway <jwc at snf.stanford.edu>
> Subject: Re: Potential issue with YES oven
> To: "Arash Hazeghi" <ahazeghi at stanford.edu>
> Cc: labmembers at snf.stanford.edu, "Mahnaz Mansourpour" <mahnaz at snf.stanford.edu>
> Date: Wednesday, October 22, 2008, 10:24 AM
> Arash,
> 
> You will likely need to perform a more thorough cleaning
> than just 
> stripping in acetone as I don't think you are obtaining
> a clean surface 
> to prime to.
> 
> I would recommend Remover PG heated to between 40 and 60 C.
> with 
> ultrasonic for 10 minutes,  then a second bath of heated
> Remover PG for 
> 5 - 10 minutes with ultrasonic,
> followed by 5 minutes in Acetone (No ultrasonic as it
> appears to often 
> break the wafer in the U/S), followed by 5 minutes in
> Isopropanol with 
> ultrasonic.  Finally a perfect NS blow off and then direct
> into the YES 
> Prime Oven.
> 
> I used the prime oven yesterday and had normal results.
> 
> Best,
> 
> James Conway
> 
> 
> Arash Hazeghi wrote:
> >
> > Hi,
> >
> > I was trying to spin Ma-N 2043 (negative eBeam resist)
> on my wafers 
> > (thermal SiO2), I used YES oven but the resist
> adhesion was very poor, 
> > literally all the resist came off during spinning
> (like putting water 
> > on a hydrophobic surface). The standard Ma-N 2043
> recipe recommends 
> > HMDS step and I had successfully coated wafers with
> identical 
> > processing in the past with Ma-N 2043. Last night, I
> tried three 
> > times, each time striping the wafers in Acetone, and
> putting them in 
> > YES oven prior to spinning but it didn't help.
> Nothing has changed in 
> > the processing of my wafers so I tend to believe there
> was something 
> > in the YES oven last night that caused poor adhesion.
> Has anyone else 
> > experienced any similar issues? Is there a solution?
> >
> >  
> >
> > Thanks,
> >
> > Arash
> >
> >  
> >
> >  
> >
> >  
> >
> >
> ----------------------------------------------------------------------------------
> >
> > Arash Hazeghi
> >
> >  
> >
> > PhD Candidate
> >
> > Stanford Center for Integrated Systems
> >
> > CIS-X 300, 420 Via Palou Mall,
> >
> > Stanford, CA 94305
> >
> >  
> >
> > phone: +1-650-725-0418
> >
> > web: http://www.stanford.edu/~ahazeghi
> >
> >  
> >


      



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