Laminar Flow Hood Repairs: metalica/sts dep Tuesday am

Mary Tang mtang at
Mon Feb 2 11:21:51 PST 2009

Hi all --

The Facilities crew is embarking on a series of repairs to the transfer 
fans which drive our laminar flow system.  On Tuesday, 2/3, from 
6:30-9:30 am, Transfer Fan #3 will be shutdown while repairs are made.  
There will be no laminar flow over the following areas:

- The analytical/test room (zygo, woollam, etc)
- metalica, sts dep, the little RTA's
- ASM epi

Although the tools themselves are not affected, there will be no 
particle control around them without the laminar flow during this time.

There will be additional laminar flow shutdown notices as the Facilities 
crew make their way through the lab.

Your SNF staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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