Si Anisotropic Etch Recipe

[Raymond Wu]

Does anyone know a recipe that can anisotropically etch Si to around 500 nm and that is also resistant to PR?
 
Thanks,
 
Ray


      
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20090205/9aa36773/attachment.html>