Si Anisotropic Etch Recipe

Raymond Wu raymondawu at yahoo.com
Thu Feb 5 22:31:14 PST 2009


Does anyone know a recipe that can anisotropically etch Si to around 500 nm and that is also resistant to PR?
 
Thanks,
 
Ray


      
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20090205/9aa36773/attachment.html>


More information about the labmembers mailing list