Si Anisotropic Etch Recipe/Process Clinic Monday

Mary Tang mtang at
Fri Feb 6 08:16:56 PST 2009

Dear Ray and Labmembers --

I would like to encourage everyone, especially those like Ray, who are 
in the process of putting together a process flow run sheet for your 
experiments, to attend the next Process Clinic/SpecMat, which is Monday, 
February 9, 2-4 pm, in the cubicle area near the main CIS entrance.  
Process staff will be on hand -- and senior labmembers are very welcome 
-- to help answer questions or brainstorm your particular process issue.

If you are putting together a new process flow runsheet (and I am sure 
you should all know what a runsheet should look like, right?  If you've 
any doubts, check here for examples:, especially if you're 
a new labmember unfamiliar with the specific resources available at SNF, 
please come to the clinic.

Hope to see you there!


Raymond Wu wrote:
> Does anyone know a recipe that can anisotropically etch Si to around 
> 500 nm and that is also resistant to PR?
> Thanks,
> Ray

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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