High-K lift off and Ebeam resist

Arash Hazeghi ahazeghi at stanford.edu
Mon Feb 9 09:39:07 PST 2009


Good morning lab members,

 

I am trying to do lift off with Ebeam resist (ZEP 520) and a high-K
(Alumina) + metal (Al) layer, I was wondering if anyone else has done this
before and what method they used.

 

Thanks,

Arash  

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