Laminar flow out over stsdep/metalica Thursday am

Mary Tang mtang at
Tue Feb 17 16:20:50 PST 2009

Hi all --

Facilities will be working on Transfer Fan 3 on Thursday morning, from 
6:30-8:30.  This means the laminar flow hoods will not be operational 
during that time above the following equipment:  sts dep, metalica, 
epi1, p2, alphastep, ellipsometer.

Your SNF staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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