Laser cutting of wafers

Shrestha Basu Mallick sbasumal at
Wed Feb 18 15:59:08 PST 2009

Hi all,
 I have some 150 mm SOI wafers that I want to send out for laser-cutting 
down to 100 mm. So far from talking to people, I know that Silicon Quest 
and Ultrasil are a couple of places that will do it. However, it seems 
that some of these places use resist/tape to protect the surface of the 
wafers which can leave residue later even after cleaning. I would like 
to keep the surface of my wafers as clean as possible. Does anybody have 
sort of experience with the above problem? Also, does anybody have any 
recommendations for which place is preferable?
Thanks in advance for all suggestions

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