PDMS Dry etching

Chong Xie chongxie at stanford.edu
Fri Feb 20 11:00:43 PST 2009

Dear labmembers,
I am trying to do a little dry etching on PDMS (1 um or so). A quick search tells me O2 CF4 mixture will do the job, but it will be wonderful that anyone could tell me which machine to go and some parameters. Any input will be helpful. Thanks in advance and have a good weekend!


More information about the labmembers mailing list