Dry Etch for TiN

Gloria Wong gloria at kovio.com
Wed Feb 25 20:14:35 PST 2009

Dear Labmembers,

I am looking for a dry etch for TiN.  Does anyone have experience with this?

Thanks in advance,

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20090225/23bd4d99/attachment.html>

More information about the labmembers mailing list