Maskless Patterning: Presentation Today (Thurs), 7/9, 1:30 pm, 101X

Mary Tang mtang at
Thu Jul 9 10:01:24 PDT 2009

Greetings labmembers:

Our esteemed Gary Yama is hosting a presentation by Intelligent Micro Patterning, a company that manufactures the SF-100 maskless photolithography system.  This is a UV-direct-write system which allows you to expose photosensitive substrates without a mask, with feature sizes down to one micron.  The substrate surfaces can be curved as well as flat.

This technical presentation will take place today, Thursday, July 9, at 1:30 pm in the Allen 101X auditorium.  More information about this system can be found on the company website at:


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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