ASML mask for optical waveguide

Yiwen Rong ryw at stanford.edu
Fri Jul 10 01:21:36 PDT 2009


Dear Labmembers:
Does anyone have simple ridge waveguide structure with 0.5um*1mm, 0.8um*1mm, 1um*1mm sizes? We would like look for such structure for simple test purposes.

Yiwen
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