Delamination problem with Pd

Arash Hazeghi ahazeghi at
Sun Jun 14 19:05:44 PDT 2009

I am using Pd in my process (~360A evaporated with Innotec) for S/D fingers
and probing pads, I can get a clean lift off however probing the pads almost
destroys them as they seem to come off very easily even with a tiny scratch
from the probe tips. Due to the nature of these devices I have to use Pd
directly on the surface. I would appreciate if anyone has a solution for
this issue.










Arash Hazeghi


PhD Candidate

Stanford Center for Integrated Systems

CIS-X 300, 420 Via Palou Mall, 

Stanford, CA 94305


phone: +1-650-725-0418



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