alternatives to Gasonics and Drytek2

Gaurav Thareja gthareja at stanford.edu
Wed Jun 17 00:27:25 PDT 2009

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Dear Labmembers.

Considering both equipments are down, please let me know the "Dry" alternative equipment to 

1. Gasonics - PR stripping

2. Drytek 2 - Descumming the PR

thanks
~gaurav

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