Metal based wafer bonding

Arunanshu Roy amroy at stanford.edu
Wed Jun 24 19:01:03 PDT 2009


Has anyone attempted metal based wafer bonding in vacuum using Ti or other
metals in SNF? I am trying to design a process for my experiment and it
would help me a lot if I could speak to someone with experience in this
technique.
Thanks and regards,
Arunanshu
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20090624/5b4dd565/attachment.html>


More information about the labmembers mailing list