Spin-on dopants

Aaron Hryciw ahryciw at stanford.edu
Mon Mar 16 11:24:42 PDT 2009


Does anyone have experience with phosphorus-containing spin-on dopants?  I
want to make an ohmic contact to n-type Si (P-doped, ~10^15 cm^-3), so I
would like to bring up my doping levels to >10ˆ19 cm^-3 under my contacts.
I would greatly appreciate any advice you can give me regarding suppliers
and/or recipes that have produced good results at SNF.


 – Aaron

Dr. Aaron Hryciw
Postdoctoral Scholar
Geballe Laboratory for Advanced Materials
Stanford University
476 Lomita Mall (04-490)
McCullough Building, Rm. 325
Stanford, CA  94305-4045

Tel.:  (650) 723-5840
Fax.:  (650) 736-1984
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