Spin-on dopants

Chris Kenney kenney at slac.stanford.edu
Mon Mar 16 11:30:15 PDT 2009


Hi Aaron,

Can you use the gaseous doping tubes: tylan5 and tylan6? Your
wafers must be CMOS-clean to use these tubes.

Chris

On Mon, 16 Mar 2009, Aaron Hryciw wrote:

> Hello,
>
> Does anyone have experience with phosphorus-containing spin-on dopants?  I
> want to make an ohmic contact to n-type Si (P-doped, ~10^15 cm^-3), so I
> would like to bring up my doping levels to >10?19 cm^-3 under my contacts.
> I would greatly appreciate any advice you can give me regarding suppliers
> and/or recipes that have produced good results at SNF.
>
> Cheers!
>
> ? Aaron
>
>
> -- 
> Dr. Aaron Hryciw
> Postdoctoral Scholar
> Geballe Laboratory for Advanced Materials
> Stanford University
> 476 Lomita Mall (04-490)
> McCullough Building, Rm. 325
> Stanford, CA  94305-4045
>
> Tel.:  (650) 723-5840
> Fax.:  (650) 736-1984
>



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