TMAH/KOH etch stop on SiO2

Arvind Kamath akamath at
Thu Mar 19 11:29:41 PDT 2009


            I have a question about using TMAH/KOH as a (poly)silicon blanket etch and its ability to stop on a thin doped oxide without attacking silicon below the doped oxide.

            Does TMAH/KOH etch n-doped oxide? If so are there ways around this? Insights would be appreciated. Is there a silicon etch which can stop on a thin n-doped SIO2?

                        Arvind Kamath
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