SiC films

Waqas Mustafeez mustafeez27 at stanford.edu
Sat Mar 28 16:57:53 PDT 2009


Is there a CVD system at SNF for SiC film deposition? Any information on how to deposit SiC and Si rich SiC films would be welcome

Thanks
WM.
-------------------------------------------------------
PhD Candidate,
Salleo Research Group,
Electrical Engineering,
Stanford, CA
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