Reminder: MEMS Seminar, TODAY: Ultra-High Density MEMS-based Probe Storage, 4-5m in Allen-101X

Roozbeh Parsa rparsa at
Wed May 6 08:24:09 PDT 2009

MEMS Seminar Announcement:

Today, May 6th, 2009
4:00 – 5:00 pm

Ultra-High Density MEMS-based Probe Storage

Dr. Nickolai Belov
Nanochip, Inc.


Nanochip developed a conceptual prototype of a probe storage device (“nanochip”) utilizing a ferroelectric non-volatile memory, which permits robust write, non-destructive read and simple data overwriting operations. Read-write operations require low power and can be performed very fast. The device contains: (a) an electromagnetic X-Y micro-mover featuring a large range of motion, low X-Y cross-talk, long-term stability, excellent shock protection and (b) an array of cantilevers with vertical and lateral electrostatic actuators and with AFM-type sharp tips (read-write heads) built on top of CMOS circuitry (read channel electronics and analog circuits for actuation control) using a low-temperature process. Vertical actuation allows for loading a selected set of tips onto media for read/write operations. Lateral actuators are used for adjusting multiple tips on corresponding data tracks permitting device operation over a wide temperature range. This work shows that significant drawbacks of the earlier probe storage concepts can be overcome and brings this type of memory devices much closer to commercialization.

Nickolai Belov received the M.S. degree in electronics and Ph.D. in microelectronics from Physics Engineering University, Moscow, Russia, in 1981 and 1989, respectively. He worked in a Sensoelectronics Lab of Physics Engineering University from 1981 to 1996. In 1996 Nickolai moved to US where he worked both for MEMS industry leaders and for startups. He has been involved in a large number of development projects in the areas of mechanical sensors, actuators, optical devices and custom microstructures as well as in support of volume manufacturing of MEMS devices and transferring MEMS devices into production. He is currently a Senior Engineering manager at Nanochip responsible for development of MEMS part of a probe storage device. His areas of expertise are in MEMS design and process development, process integration, testing and packaging of MEMS devices, physics of sensors and actuators.
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