TiN deposition

Jason David Komadina jkoma at stanford.edu
Mon Nov 16 11:07:00 PST 2009

Previous message: Reminder: Process Clinic, Monday, 11/16, 2-4 pm
Next message: PhD Orals - Filip Crnogorac, FRIDAY, Nov. 20; 1:00pm
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Does anyone have experience with titanium nitride deposition? I'm also interested in dry etching TiN.

Thanks,
Jason

Previous message: Reminder: Process Clinic, Monday, 11/16, 2-4 pm
Next message: PhD Orals - Filip Crnogorac, FRIDAY, Nov. 20; 1:00pm
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the labmembers mailing list