Cleaning after dry etching (Removal of Fluorine)

[Joongsun Park]

Dear labmembers,

Does anyone know how to clean samples after dry etching?
I could observe a lot of Fluorine contaminants after etching. If anyone
knows cleaning processes please let me know.
Many thanks in advance.

Best,
Joongsun
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20091116/37b55d5a/attachment.html>