Cleaning after dry etching (Removal of Fluorine)

Joongsun Park joongsun.park at
Mon Nov 16 17:52:41 PST 2009

Dear labmembers,

Does anyone know how to clean samples after dry etching?
I could observe a lot of Fluorine contaminants after etching. If anyone
knows cleaning processes please let me know.
Many thanks in advance.

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