Suspended structure - backside etching
lizj at stanford.edu
Tue Sep 29 14:49:56 PDT 2009
I am designing some suspended structures (something like the membranes of pressure sensors) on silicon wafer but feel myself bogged down by the fab process. I will very appreciate if anyone who has experience in (or is currently doing) back-side litho/etching could offer me a couple of minutes to give some hints on the process details.
Thanks a lot,
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