Suspended structure - backside etching

Zijian Li lizj at stanford.edu
Tue Sep 29 14:49:56 PDT 2009


Dear labmembers,

I am designing some suspended structures (something like the membranes of pressure sensors) on silicon wafer but feel myself bogged down by the fab process. I will very appreciate if anyone who has experience in (or is currently doing) back-side litho/etching could offer me a couple of minutes to give some hints on the process details.

Thanks a lot,
Zijian



More information about the labmembers mailing list