From koo1028 at stanford.edu Thu Apr 1 13:43:45 2010 From: koo1028 at stanford.edu (Kyunghoae Koo) Date: Thu, 1 Apr 2010 13:43:45 -0700 Subject: Pd deposition on SiO2 Message-ID: <002501cad1dc$062b6d00$12824700$@edu> Dear Labmembers, Pd also tends to fall off from the SiO2 surface as Au does? If it does, do I also need Cr or Ti pad layer? Thanks Kyunghoae -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Thu Apr 1 20:11:02 2010 From: shott at stanford.edu (John Shott) Date: Thu, 01 Apr 2010 20:11:02 -0700 Subject: Slippery floor in front of svgdev ... Message-ID: <4BB56046.9050703@stanford.edu> SNF Lab Members: Earlier this evening Rishi reported a slippery spot on the floor in front of svgdev. While trying to investigate, we realized that there was a very slow leak coming through the ceiling. Further investigation revealed that there was a 1 meter diameter puddle of the hot water that is used to heat the cleanroom sitting on the floor directly above this area. This water must contain an additive that makes it very slippery. In any event, we have dried the puddle on the floor and confirmed that there is no additional leakage. However, there is likely still water below the fan deck but above the HEPA filters that is inaccessible. As a result, there will likely continue to be additional slow leakage overnight. We have marked the area with two plastic caution signs. Please be EXCEEDINGLY CAREFUL when walking in this area ... it is quite slippery. We may put down spill absorbent pads ... but be very careful when walking on them because they are likely still very slippery. Have a safe, but productive, evening, John From aokyay at ee.bilkent.edu.tr Thu Apr 1 13:21:45 2010 From: aokyay at ee.bilkent.edu.tr (ali kemal okyay) Date: Thu, 01 Apr 2010 23:21:45 +0300 Subject: Platinum etch Message-ID: Dear labmembers, I was wondering if anyone is etching platinum with wet or dry chemistry? Thanks a bunch, Ali ____________________________________________________________________________ ____ Dr. Ali K. Okyay | Assistant Professor | Department of Electrical and Electronics Engineering | Bilkent University | aokyay at ee.bilkent.edu.tr | -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Fri Apr 2 16:40:14 2010 From: mtang at stanford.edu (Mary Tang) Date: Fri, 02 Apr 2010 16:40:14 -0700 Subject: The E341 MEMS Fab Class is coming! Message-ID: <4BB6805E.9000706@stanford.edu> Dear Labmembers: The E341 MEMS Fab Class begins in the lab next week. This is an intensive, popular 10-week, hands-on fabrication course (for more info, check the class website.) In addition to lectures, the course has a series of formal lab sessions, scheduled for Mondays, 8-12 and 1-5 and Wednesdays, from 1-5, and starting a few weeks in, E341 students are expected to begin processing on their own in the lab. This year, we're fortunate to have Beth Pruitt, a former SNF labmember herself, teaching the course, with Nahid Harjee roped in to serve again as head TA. Please be aware that various equipment will be reserved for the lab sessions and that the regular 15-minute rule will not apply during these sessions. For your reference, the E341 equipment schedules will be posted outside the gowning room. If you would like to squeeze use of a tool reserved for E341 while it is idle, please check with the TA for that lab session (contact info on the posted schedule.) For anyone not familiar with this course (although between veteran students, TA's, instructors and mentors, I'm not sure there aren't many who haven't contributed over the years), you should know that these students will be your SNF labmates in a few short weeks. Please give them your support by answering questions and offering advice. Thanks for your attention -- The organizers of E341 and your SNF Staff From shott at stanford.edu Sat Apr 3 07:19:45 2010 From: shott at stanford.edu (John Shott) Date: Sat, 03 Apr 2010 07:19:45 -0700 Subject: New Coral release .... Message-ID: <4BB74E81.4020508@stanford.edu> SNF Lab Members: Team Coral has pushed out the latest release of Coral. This allows you to fire up xReporter in your default browser from within Coral. To do this select the "Report Engine" menu item from the left most Window menu. Also, there is a menu item under the Equipment menu named "Browse Manual". If you select this menu item when you have a piece of equipment highlighted in the equipment tree, it will open the relevant manual page (if one has been defined) in your default browser. At this point approximately 2/3 of the pieces of equipment have links of this type and that fraction will increase over time. Two additional comments: 1. If you do not have a default browser set, this will not work. On the Sunrays, you can test this out first by opening firefox, assuming that is the default browser that most of you use on the Sunrays. If it asks you something like "Firefox is not currently your default browser. Would you like this to be your default browser?" You should answer in the affirmative so that you have a default browser set to take advantage of these new Coral features. 2. As advertised earlier, this latest version requires Java Version 6. While most of you likely already have an appropriate Java Runtime Environment (JRE) installed on machines on which you run Remote Coral, if Remote Coral suddenly will not start for largely unspecified reasons, you likely need to download and install JRE Version 6. If you have a Windows, Linux, or Solaris platform, you can download that by going to: http://java.sun.com/javase/downloads/index.jsp On that page there are a number of red buttons that say "Download" ... but there will be only one button that says "Download JRE" If you click that link, you will be able to download and install the Java Runtime Environment onto your machine. That version will run the existing version of Remote Coral but will also be what you need when we release the new version of Java later this week. Let us know if you encounter any problems. Thank you for your continued support, John From rthowe at stanford.edu Mon Apr 5 08:04:55 2010 From: rthowe at stanford.edu (Roger T. Howe) Date: Mon, 05 Apr 2010 08:04:55 -0700 Subject: spring quarter N/MEMS seminars In-Reply-To: <4BAD3834.5080504@stanford.edu> References: <4BAD3834.5080504@stanford.edu> Message-ID: <4BB9FC17.1040603@stanford.edu> All, As a heads up, here's the list of seminars for the upcoming quarter. No titles or abstracts yet, but the talk by Tony Tang on the Siimpel auto-focus motor for cellphone cameras on June 1 is a chance to connect with an interesting startup from L.A. Anne is doing extreme nanofab at the Advanced Light Source ... two heavy-hitters from BSAC, as well as Anita Flynn to talk about her flying cm-scale robot. Adam is a senior Ph.D. student who's been doing interesting work with Sam Gambhir in the medical school. Last and certainly not least, Franz Laemer is headed to Hilton Head for a plenary talk on silicon DRIE, but is in town and will give it here on Friday, June 4. Roger > Location: Allen 101X Auditorium > Time: 4:00-5:00 pm > > April 13 Anne Sakdinawat, LBNL > April 27 Adam de la Zerda, EE Dept. and Molecular Imaging Program, > Stanford > May 4 Liwei Lin, ME Dept. and BSAC, UC Berkeley > May 11 Michel Maharbiz, EECS Dept. and BSAC, UC Berkeley > May 25 Anita Flynn, Micropropulsion, Berkeley > June 1 Tony Tang, Siimpel, Arcadia > June 4 Franz Laemer, Bosch Research, Stuttgart > From rfasch at stanford.edu Mon Apr 5 09:50:34 2010 From: rfasch at stanford.edu (Rainer Fasching) Date: Mon, 5 Apr 2010 09:50:34 -0700 Subject: Cu ALD or CVD Message-ID: <002401cad4e0$1c7edf40$557c9dc0$@edu> All: I'm looking desperately for sources for ALD or CVD copper depositions. Please let me know, if you know anyone who could help. Thanks, Rainer Rainer Fasching, PhD Cons. Associate Professor Department of Mechanical Engineering Stanford University Mail: 440 Escondido Mall, Bldg. 530, Rm. 220, Stanford, CA 94305-3030 Email: rfasch at stanford.edu Phone: 415-505-3385 Fax: 650-723-5034 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Mon Apr 5 10:08:07 2010 From: mtang at stanford.edu (Mary Tang) Date: Mon, 05 Apr 2010 10:08:07 -0700 Subject: Process Clinic Today (Monday) 2-3:30 Message-ID: <4BBA18F7.3040907@stanford.edu> Greetings labmembers -- Just a reminder that there is a Process Clinic today (Monday) from 2-3:30 pm in the cubicle area outside of Maureen's office (note end time change!) Staff and senior labmembers will be on hand to answer questions and brainstorm ideas to address process issues. Bring your ideas, process questions, your process runsheets, SpecMat request, device layouts, and whatever else. (For anyone wanting to meet with Keith Best, he'll be around from 1:30-2 in this area.) Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From bayoung at stanford.edu Mon Apr 5 11:57:58 2010 From: bayoung at stanford.edu (Betty Young) Date: Mon, 5 Apr 2010 11:57:58 -0700 (PDT) Subject: Cu ALD or CVD In-Reply-To: <805338819.1317371270493837590.JavaMail.root@zm08.stanford.edu> Message-ID: <1998828353.1318001270493878157.JavaMail.root@zm08.stanford.edu> Hi, I am not sure what is available, but you might try: http://www.lebowcompany.com/ Good luck, Betty Young ----- Original Message ----- From: "Rainer Fasching" To: labmembers at snf.stanford.edu Sent: Monday, April 5, 2010 9:50:34 AM GMT -08:00 US/Canada Pacific Subject: Cu ALD or CVD All: ? I?m ?looking desperately for sources for ALD or CVD copper depositions. Please let me know, if you know anyone who could help. ? Thanks, Rainer ? ? Rainer Fasching, PhD Cons. Associate Professor Department of Mechanical Engineering Stanford University ? Mail: 440 Escondido Mall, Bldg. 530, Rm. 220, Stanford, CA 94305-3030 Email: rfasch at stanford.edu Phone: 415-505-3385 Fax: 650-723-5034 ? ? From duygu at stanford.edu Tue Apr 6 11:34:14 2010 From: duygu at stanford.edu (Duygu Kuzum) Date: Tue, 6 Apr 2010 11:34:14 -0700 (PDT) Subject: Signatone probe station? Message-ID: <1358746519.3511671270578854057.JavaMail.root@zm03.stanford.edu> Dear Labmembers, Does anyone know which group at Stanford has a Signatone S-1160 probe station? I just want to take a look at it. I promise I won't ask to use it :) Thanks, Duygu From jaehlee at stanford.edu Tue Apr 6 15:14:31 2010 From: jaehlee at stanford.edu (Jae Hyung Lee) Date: Tue, 6 Apr 2010 15:14:31 -0700 Subject: Seminar: Anne Sakdinawat Tues, April 13, 4:00-5:00pm, Allen 101X Message-ID: Tuesday, April 13, 2010 4:00-5:00pm, Allen 101X Auditorium Nanoscale Imaging with Soft X-rays Anne Sakdinawat UC Berkeley, Electrical Engineering and Computer Sciences Abstract: Nanoscale imaging with soft x-rays provides opportunities for element specific studies across a wide range of applications in the physical and life sciences with spatial resolutions approaching 10 nm. Areas of application include magnetic materials, bio-tomography and environmental sciences, to name a few. Presently, these studies are conducted at synchrotron radiation facilities, but free electron lasers (FELs), such as Stanford?s LCLS, are just becoming available for complimentary femtosecond duration dynamical studies. It is also possible that in the future, relatively compact soft x-ray lasers will evolve to have sufficient photon flux and brightness to permit studies on university campuses, industrial, and clinical environments. In this talk, I will present my work in novel x-ray imaging techniques, such as spiral and other phase contrast techniques, methods for increasing the depth of field for enhancement of 3-D tomographic resolution, and 2-D resolution enhancement techniques. I will discuss fabrication of the requisite optical nanostructures, and use of these techniques at synchrotrons, FELs, and compact sources. I will also discuss relevant applications in nanomagnetic imaging at the iron, cobalt, and manganese edges, concrete formation studies at the calcium edge, and single cell tomography imaging in the water window, just below the oxygen K-edge. Biography: After receiving her Ph.D. in Bioengineering in 2008 from the University of California at Berkeley, Anne Sakdinawat joined the department of Electrical Engineering and Computer Sciences as an assistant research scientist. Dr. Sakdinawat?s research interests encompass the fields of x-ray optics and x-ray imaging, nanofabrication, and materials science. Dr. Sakdinawat was a recipient of the Werner-Meyer Ilse Award given to young scientists for exceptional contributions to the advancement of x-ray microscopy. From mtang at stanford.edu Tue Apr 6 16:46:04 2010 From: mtang at stanford.edu (Mary Tang) Date: Tue, 06 Apr 2010 16:46:04 -0700 Subject: Venture Clinic@SNF, Wednesday, 5 pm Message-ID: <4BBBC7BC.8020207@stanford.edu> Greetings labmembers -- Shahin Farschi of Lux Capital will be hosting the Venture Clinic Wed, April 6, at 5 pm, in Allen 101. Here's an opportunity to learn about the current climate in the venture world or bounce around any startup ideas you might have. Shahin's contact information is below: Shahin Farshchi, Ph.D. Senior Associate Lux Capital Management, LLC C: 925.323.2784 http://www.luxcapital.com -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at stanford.edu Wed Apr 7 11:17:48 2010 From: mtang at stanford.edu (Mary Tang) Date: Wed, 07 Apr 2010 11:17:48 -0700 Subject: Labmembers'/New Equipment Meeting: Tues. Apr. 13, 1pm Auditorium Message-ID: <4BBCCC4C.3030805@stanford.edu> Dear Labmembers -- As you may be aware, we were fortunate last year to obtain funding that would allow us to acquire new tools. We were able to obtain a stimulus grant and leverage this to obtain supplemental funds from other faculty and programs, such as the new nanobuilding. Last December, we presented an outline of plans to acquire new equipment for the lab and solicited your input for their selection. Thanks to your input and the due diligence of the new equipment team, tools have been ordered and are being built and even shipped at this moment. A couple of them are already here. Now, already installation plans are underway and some of you are already experiencing some of the disruptions to normal lab operations. Here is the list of new tools: - RTA 610 (two of them, to replace the two RTA210's) - IntlVac Ebeam evaporator - IntlVac PVD/Sputter deposition system - PlasmaTherm ICP Plasma-Enhanced Vapor Deposition system - PlasmaTherm Capactively-Coupled Plasma-Enhaced Vapor Deposition System - Two-Chamber Cambridge Nanotech Fiji ALD system We invite you to come and hear all about the new equipment at a labmembers' meeting to be held on Tuesday, April 13, at 1 pm in the Allen Auditorium. You will hear about their process capabilities, installation/qualification timelines, and logistics. If you can't make the meeting, the presentations will be posted soon afterward. We would especially welcome your input as to how we can make this transitions with minimum impact to your work With added capacity and lots of new capability, these tools will no doubt transform research here. We are all excited about the new possibilities and invite everyone in the lab community to contribute their success. The New Equipment Team (John Shott, Ed Myers, Jim McVittie, Tom O'Sullivan, J Provine, Ted Berg, Jim Haydon, Elmer Enriquez, Mary Tang) From koo1028 at stanford.edu Wed Apr 7 11:45:25 2010 From: koo1028 at stanford.edu (Kyunghoae Koo) Date: Wed, 7 Apr 2010 11:45:25 -0700 Subject: Pd etchant? Message-ID: <007f01cad682$7cb798e0$7626caa0$@edu> Hi All, Any Pd wet etchant is available in SNF? Should I go with a dry etching? Thanks Kyunghoae =========================================================== Kyung-Hoae Koo PhD candidate Stanford University EE department -------------- next part -------------- An HTML attachment was scrubbed... URL: From bayoung at stanford.edu Wed Apr 7 12:15:09 2010 From: bayoung at stanford.edu (Betty Young) Date: Wed, 7 Apr 2010 12:15:09 -0700 (PDT) Subject: Pd etchant? In-Reply-To: <007f01cad682$7cb798e0$7626caa0$@edu> Message-ID: <339913343.2042561270667709539.JavaMail.root@zm08.stanford.edu> My understanding is that Pd is not allowed in lab - I had to do all Pd work off-campus. Perhaps that has changed.... Betty ----- Original Message ----- From: "Kyunghoae Koo" To: labmembers at snf.stanford.edu Sent: Wednesday, April 7, 2010 11:45:25 AM GMT -08:00 US/Canada Pacific Subject: Pd etchant? Hi All, ? Any Pd wet etchant is available in SNF? Should I go with a dry etching? Thanks ? Kyunghoae ? ? =========================================================== Kyung-Hoae Koo PhD candidate Stanford University EE department ? From achandra at kovio.com Wed Apr 7 13:21:26 2010 From: achandra at kovio.com (Aditi Chandra) Date: Wed, 7 Apr 2010 13:21:26 -0700 Subject: Pd etchant? In-Reply-To: <007f01cad682$7cb798e0$7626caa0$@edu> References: <007f01cad682$7cb798e0$7626caa0$@edu> Message-ID: <0A734412B02624499172B7366A97336B3EB5E5EBE4@server.print-this.com> You can use Au wet etchant. It is used to be available at SNF. May still be. ________________________________ From: Kyunghoae Koo [mailto:koo1028 at stanford.edu] Sent: Wednesday, April 07, 2010 11:45 AM To: labmembers at snf.stanford.edu Subject: Pd etchant? Hi All, Any Pd wet etchant is available in SNF? Should I go with a dry etching? Thanks Kyunghoae =========================================================== Kyung-Hoae Koo PhD candidate Stanford University EE department -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Wed Apr 7 14:23:24 2010 From: toecutter4ranger at gmail.com (ToeCutter) Date: Wed, 7 Apr 2010 14:23:24 -0700 Subject: Pd etchant? In-Reply-To: <339913343.2042561270667709539.JavaMail.root@zm08.stanford.edu> References: <339913343.2042561270667709539.JavaMail.root@zm08.stanford.edu> Message-ID: <7928B03C-6887-4517-AAD0-C6DE60FA0E28@gmail.com> I don't think there are any restrictions on Pd in the SNF cleanroom other than it would be in the Au contaminated equipment group. We use Pd coatings for charge compensation and to improve contrast in SEM imaging Best James Conway Ebeam lab at SNF On Apr 7, 2010, at 12:15 PM, Betty Young wrote: > My understanding is that Pd is not allowed in lab - I had to do all > Pd work off-campus. > Perhaps that has changed.... > > Betty > ----- Original Message ----- > From: "Kyunghoae Koo" > To: labmembers at snf.stanford.edu > Sent: Wednesday, April 7, 2010 11:45:25 AM GMT -08:00 US/Canada > Pacific > Subject: Pd etchant? > > > > > Hi All, > > > > Any Pd wet etchant is available in SNF? Should I go with a dry > etching? > > Thanks > > > > Kyunghoae > > > > > > =========================================================== > > Kyung-Hoae Koo > > PhD candidate > > Stanford University > > EE department > > From mtang at stanford.edu Thu Apr 8 06:54:35 2010 From: mtang at stanford.edu (Mary Tang) Date: Thu, 08 Apr 2010 06:54:35 -0700 Subject: SNF Alphastep and Lab Bins Message-ID: <4BBDE01B.30102@stanford.edu> Greetings labmembers -- You may have noticed a few changes in the lab. In preparation for the arrival of new equipment (come to Tuesday afternoon's labmembers' meeting to learn more!) some furniture has moved around. Lab Bins: Lab bins in tall shelving near the old alphastep/chemicals passthrough (A70-A119) are now in the room where the Flammables cabinets live. Lab bins that were under tables in that area (A120-129, A30-39) are now near the gasonics. Please be aware that these may move again, as equipment arrives. Analytical tools: The analytical tools in this area are now located in the old mask room just off to the right side as you enter the Litho area. Alphastep: The long saga of the old alphastep 200 is coming to a close. Our old system had been "repaired" but is still not functioning the way it should be (accurate, but a lot more noise). Ted and Ul have arranged for a trade-up to an AS500, now located in the old mask room with the other analytical tools. Uli has written operating procedures and has been training interested people on this system, although it should be straightforward from the instructions for anyone who knows the 200. It is pretty simple, but has a lot more features than the old 200. Please be aware that the old AS200 will be leaving the lab Friday. Thanks for your attention and patience as we stage the new tool installation (more details at Tuesday's meeting!) Your SNF Staff From shott at stanford.edu Thu Apr 8 18:33:21 2010 From: shott at stanford.edu (John Shott) Date: Thu, 08 Apr 2010 18:33:21 -0700 Subject: Annoying windows popping up over the top of Coral in CDE window manager .... Message-ID: <4BBE83E1.5050603@stanford.edu> SNF Lab Members: Several folks have reported an annoying behavior in the latest version of Coral on the Sunrays that, we believe, only happens with the older CDE desktop environment. If you enable a tool, after you hit OK in the window that allows you to select project and account, rather than the normal Coral window returning to the top, if you have an underlying window, such as a command prompt, it will move to the top. This is an interaction between the CDE (Common Desktop Environment) and the Java GUI stuff. Sun/Oracle is aware of this .... and has been for some time ... but has not come up with a fix. One way around this is to not use the Common Desktop Environment, but to use the Java Desktop System (JDS) that does not appear to be affected by this problem. Even if you do not want to make a permanent change away from CDE to JDS, you can test it out temporarily. Here is how: Next time you are about to login to one of the Sunrays, make sure that you insert a smart card .... if you don't have a smart card inserted you don't get the right options. Before you type in your login name, select the Option button, select the Sessions sub-menu item, and then select "Java Desktop System, Release 3" under that. Then login and you will get a different looking set of windows ... and, I think, you should find Coral at the top of the start menu. In any event, from this point on, you will automatically get the Java Desktop System rather than the older Common Desktop Environment unless and until you select these options again (with a smart card inserted) and explicly switch back to the Common Desktop Environment. We apologize that we did not spot this earlier ... but, by default, we happen to use the Java Desktop System and this is the first case where we've ever seen a difference between the two desktop environments. Let us know if you have any further problems, John From stuhrman at stanford.edu Thu Apr 8 19:03:20 2010 From: stuhrman at stanford.edu (Norbert Stuhrmann) Date: Thu, 8 Apr 2010 19:03:20 -0700 Subject: German student wanted Message-ID: <09D62401-0A3E-402F-B4FC-5D5203F4FCAF@stanford.edu> Hi, In connection with the visit of German chancellor Angela Merkel the German TV station Deutsche Welle wants to do a background story. It is supposed to feature an interview with a German student working on "nanotechnology". If you are German and interested in doing an interview tomorrow or Saturday please directly contact Andreas who is the student coordinating this. His phone number is 650-336-3136 and he is also cc'ed. Norbert From goldhaber-gordon at stanford.edu Thu Apr 8 21:00:54 2010 From: goldhaber-gordon at stanford.edu (David Goldhaber-Gordon) Date: Thu, 8 Apr 2010 21:00:54 -0700 Subject: 2nd Notice Stanford Nanoprobes Workshop! - May 14, 2010 In-Reply-To: <6.2.5.6.2.20100406114618.036a8c98@stanford.edu> References: <6.2.5.6.2.20100406114618.036a8c98@stanford.edu> Message-ID: April 8, 2010 ? SECOND NOTICE Dear SNF labmembers (feel free to forward to others), You are cordially invited to: Stanford University?s Center for Probing the Nanoscale (CPN) 6th Annual Workshop Friday, May 14, 2010 8:30-6, with continental breakfast and lunch included. Poster session from 4-6, with hors d'oeuvres served. STUDENTS AND POSTDOCS ARE FREE, BUT EVERYONE MUST REGISTER! Registration: Location: Bechtel Conference Center, Encina Hall, 616 Serra Mall, Stanford University. Speakers include: Alexander Balatsky, Los Alamos National Laboratory " Dirac Materials" Irfan Siddiqi, University of California, Berkeley "Noiseless Amplification in Superconducting Nanoscale Magnetometers" Tetsuo Hanaguri, RIKEN Advanced Science Institute, Saitama, Japan " Spectroscopic-Imaging STM at High Magnetic Fields" Ray Ashoori, MIT "Extremely High Energy Resolution Spectroscopy of Two-Dimensional Electronic Systems" Roya Maboudian, University of California, Berkeley "Probing Interfacial Contact via MEMS-based Instrumentation" Wilson Ho, University of California, Irvine "Single Spin Phenomena" David A. Muller, Cornell University "Atomic-Resolution Imaging of the Physical and Electronic Structure of Nano-Devices" Keith Schwab, California Institute of Technology "Exploration of the Quantum Properties of Nanoscale Electro-Mechanical Structures" Andreas Heinrich, IBM "Measuring Spin Relaxation Times of Single Atoms with Nanosecond Time Resolution" ----------------------------------------------------------------- David Goldhaber-Gordon goldhaber-gordon at stanford.edu Associate Professor of Physics davidg at post.harvard.edu and Deputy Director, (permanent forwarding) Center for Probing the Nanoscale Stanford University www.stanford.edu/group/cpn/ (650) 725-2047 (lab) (650) 724-3709 (office) Address for letters or packages: Administrative Associate: David Goldhaber-Gordon Roberta Edwards Geballe Laboratory for Advanced Materials McCullough, Rm. 338 McCullough Building, Room 346 Phone: (650) 723-8028 476 Lomita Mall Fax: (650) 724-3681 Stanford, CA 94305-4045 email: redward at stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: AdMar5.3.jpg Type: application/octet-stream Size: 155299 bytes Desc: not available URL: From jprovine at stanford.edu Fri Apr 9 05:29:58 2010 From: jprovine at stanford.edu (J Provine) Date: Fri, 9 Apr 2010 05:29:58 -0700 Subject: Moving new Fiji ALD system into the SNF Friday afternoon Message-ID: Dear labmembers, Thursday SNF received our new Fiji ALD system from Cambridge NanoTech. Friday around 1:30-2:30 we will move the tool into SNF through the doors near the chemical pass through and place it in the recently cleared space there. This move should be brief and the fab will only be breached for a short time, but please be aware if your are planning sensitive work inthis area around this time. Thank you. J and the new equipment team From jprovine at stanford.edu Fri Apr 9 13:36:15 2010 From: jprovine at stanford.edu (J Provine) Date: Fri, 9 Apr 2010 13:36:15 -0700 Subject: Moving new Fiji ALD system into the SNF Friday afternoon In-Reply-To: References: Message-ID: dear labmembers, there is a delay with getting the system on its wheels for movement into the fab...it looks likely to still happen today, but definitely not 1:30-2:30 window originally indicated. j On Fri, Apr 9, 2010 at 5:29 AM, J Provine wrote: > Dear labmembers, > Thursday SNF received our new Fiji ALD system from Cambridge NanoTech. > Friday around 1:30-2:30 we will move the tool into SNF through the > doors near the chemical pass through and place it in the recently > cleared space there. > > This move should be brief and the fab will only be breached for a > short time, but please be aware if your are planning sensitive work > inthis area around this time. > > Thank you. > J and the new equipment team > -------------- next part -------------- An HTML attachment was scrubbed... URL: From kattsai at stanford.edu Mon Apr 12 11:53:49 2010 From: kattsai at stanford.edu (Katherine Tsai) Date: Mon, 12 Apr 2010 11:53:49 -0700 Subject: PhD Defense - Katherine Tsai, Thursday, April 15, 2010, 1:00 pm In-Reply-To: References: Message-ID: Stanford University Ph.D. Dissertation Defense Title: ?Magnetic Nanoparticle-based Technologies for Lab-on-a-Chip Applications? Katherine Tsai Department of Electrical Engineering Research Advisor: ?Prof. Roger Howe Date: ?Thursday, April 15, 2010 Time: 1:00 pm (Refreshments beforehand) Location: CIS-X 101 (Auditorium) http://campus-map.stanford.edu/index.cfm?ID=04-055 Abstract: Lab-on-a-Chip devices are attractive for medical diagnostics due to their ability to perform laboratory tasks on small scales. ?In this talk, I will show how magnetic nanoparticle-based technologies hold promise for low-power, remote actuation in Lab-on-a-Chip systems, with a focus on two applications: cell separation and microfluidic pumping. ?I will first describe the characterization of the magnetic, optical, and mechanical properties of a magnetic polymer composed of SU-8 polymer embedded with magnetic nickel nanoparticles. ?Next, I will show how micropillars made of this magnetic polymer can be used to capture magnetic bead-bound breast cancer cells in microchannels. Finally, I will demonstrate how magnetic nanoparticles suspended within a fluid can be used for chemistry-independent microfluidic pumping. From mustafeez27 at stanford.edu Mon Apr 12 14:52:19 2010 From: mustafeez27 at stanford.edu (Waqas Mustafeez) Date: Mon, 12 Apr 2010 14:52:19 -0700 Subject: looking for pieces of doped si Message-ID: Hi, I'm looking for scrap pieces of n type silicon doped to ~10^18 for testing a characterization technique. If anyone has some pieces I can take let me know. Thank you WM. -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Mon Apr 12 16:40:14 2010 From: mtang at stanford.edu (Mary Tang) Date: Mon, 12 Apr 2010 16:40:14 -0700 Subject: Reminder: Labmembers' New Equipment Mtg, Tuesday, 1 pm Message-ID: <4BC3AF5E.5030201@stanford.edu> Just a reminder of the Labmembers'/New Equipment Meeting tomorrow (Tuesday), April 13, at 1 pm in the Auditorium. For more details see: http://snf.stanford.edu/cgi-bin/ezmlm-cgi?mss:4063:201004:eiadidebombcfmidnkdh Or just come tomorrow! Information will be posted shortly afterward. Your New Equipment Team Members From jennyhu at stanford.edu Tue Apr 13 00:23:28 2010 From: jennyhu at stanford.edu (Jenny Hu) Date: Tue, 13 Apr 2010 00:23:28 -0700 (PDT) Subject: Dry Etching of Metals with Good Selectivity In-Reply-To: <516727558.1780961271143127415.JavaMail.root@zm06.stanford.edu> Message-ID: <162217757.1781831271143408297.JavaMail.root@zm06.stanford.edu> Hi Labmembers, I'm looking for a suitable metal for a gate first MOSFET flow. I am thinking of using a dual metal structure where the top metal can be dry etched with selectivity over the bottom metal. I would also like to be able to wet etch the bottom metal to prevent overetching and roughening the underlying substrate, which may limit me to Ti, Cr, and Au. Both metals also need to withstand a 600C, so Al is not an option. If you know of a suitable dry etch chemistry, please tell me. Another option for me is to use a single metal structure, if there is a metal that can be dry etched with good selectivity to Al2O3 or InGaAs. Thank you in advance for your help! Thanks, Jenny From rthowe at stanford.edu Tue Apr 13 09:20:08 2010 From: rthowe at stanford.edu (Roger T. Howe) Date: Tue, 13 Apr 2010 09:20:08 -0700 Subject: seminar today: 4-5, Anne Sakdinawat, LBNL Message-ID: <4BC499B8.8080108@stanford.edu> All, I've appended a flyer for Anne's seminar, today at 4:00 -- here's the list of upcoming seminars. Location: Allen 101X Auditorium Time: 4:00-5:00 pm April 13 Anne Sakdinawat, LBNL April 27 Adam de la Zerda, EE Dept. and Molecular Imaging Program, Stanford May 4 Liwei Lin, ME Dept. and BSAC, UC Berkeley May 11 Michel Maharbiz, EECS Dept. and BSAC, UC Berkeley May 25 Anita Flynn, Micropropulsion, Berkeley June 1 Tony Tang, Siimpel, Arcadia June 4 Franz Laermer, Bosch Research, Stuttgart -------------- next part -------------- A non-text attachment was scrubbed... Name: ASakdinawat_April2010.doc Type: application/msword Size: 43520 bytes Desc: not available URL: From fanpy839 at stanford.edu Tue Apr 13 11:52:37 2010 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Tue, 13 Apr 2010 11:52:37 -0700 Subject: Al2O3 etch Message-ID: Hi All, I need to etch ~20nm of Al2O3 (grown ALD). Does anybody have any experience of wet etch of such materials? (e.g. etchant, etch rate and etc.) Thank you so much! Best, -- Pengyu Fan PhD Candidate Materials Science & Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Tue Apr 13 12:42:29 2010 From: jprovine at stanford.edu (J Provine) Date: Tue, 13 Apr 2010 12:42:29 -0700 Subject: Al2O3 etch In-Reply-To: References: Message-ID: Koh will etch al2o3. I'm not sure about etch rate exactly, but it won't take very long at all to etch 20 nm. J On Tuesday, April 13, 2010, Pengyu Fan wrote: > Hi All, > I need to etch ~20nm of Al2O3 (grown ALD). Does anybody have any experience of wet etch of such materials? (e.g. etchant, etch rate and etc.) > Thank you so much! > > Best,-- > Pengyu Fan > > PhD Candidate > Materials Science & Engineering > Stanford University > > From mcvittie at cis.Stanford.EDU Tue Apr 13 12:58:43 2010 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Tue, 13 Apr 2010 12:58:43 -0700 (PDT) Subject: Al2O3 etch In-Reply-To: Message-ID: Pengyu, ALD Al2O3 etches in 50:1 HF. I will have to check the rate but I expect 2 min should enough. Jim On Tue, 13 Apr 2010, J Provine wrote: > Koh will etch al2o3. I'm not sure about etch rate exactly, but it > won't take very long at all to etch 20 nm. > J > > On Tuesday, April 13, 2010, Pengyu Fan wrote: > > Hi All, > > I need to etch ~20nm of Al2O3 (grown ALD). Does anybody have any experience of wet etch of such materials? (e.g. etchant, etch rate and etc.) > > Thank you so much! > > > > Best,-- > > Pengyu Fan > > > > PhD Candidate > > Materials Science & Engineering > > Stanford University > > > > > -- -------------------------------------------------------------- James (Jim) P. McVittie, Ph.D. Sr. Research Scientist Paul G. Allen Building Electrical Engineering Stanford Nanofabrication Facility jmcvittie at stanford.edu Stanford University Office: (650) 725-3640 Rm. 336X, 330 Serra Mall Lab: (650) 721-6834 Stanford, CA 94305-4075 Fax: (650) 723-4659 From jaehlee at stanford.edu Tue Apr 13 16:58:04 2010 From: jaehlee at stanford.edu (Jae Hyung Lee) Date: Tue, 13 Apr 2010 16:58:04 -0700 Subject: Seminar: Adam de la Zerda, Tuesday, April 27, 4:00-5:00pm, Allen 101X Auditorium Message-ID: Photoacoustic Molecular Imaging and its Biomedical Applications Adam de la Zerda Stanford University, Department of Electrical Engineering and the Molecular Imaging Program Abstract: Photoacoustic imaging is a new medical imaging field with tremendous clinical and commercial potential. In this talk, I will show how we utilize the 'photoacoustic effect' - the conversion of short light pulses into ultrasound waves, for performing highly sensitive disease detection in a living body. By measuring the ultrasound waves emanating from the body, one can create a detailed 3D image of the blood vessels structure, oxygen saturation levels and track external contrast agent molecules as they target diseased tissues such as cancer. I will present our experimental photoacoustic imaging system, reviewing its various aspects including: optics, electronics, ultrasound, image processing, nanoparticle chemistry, biology and medicine. Finally, a number of medical needs we attempt to solve using this technology will be introduced, including cancer, eye diseases, and lymphatic diseases. Biography: Adam de la Zerda is a Ph.D. candidate at the Dept. of Electrical Engineering at Stanford. He works on Photoacoustic Molecular Imaging and its application for ophthalmic and cancer imaging under the mentorship of Prof. Sanjiv Sam Gambhir at the Radiology and Bioengineering departments at Stanford University. Mr. de la Zerda has received over 14 awards for his work including the Best Poster Presentation at SPIE Photonics West (2009), the Young Investigator Award at the World Molecular Imaging Congress (2008), the Department of Defense Breast Cancer Research Program Award for Predoctoral researchers (2008), the Bio-X Graduate Student Fellowship (2008), and first place at the Bay Area Entrepreneurship Contest (2007). He has published over 10 papers in leading journals including Nature Nanotechnology, Nano Letters, and PNAS, some of which received significant press coverage from Forbes Magazine, US News and The Washington Post. He holds a number of patents and is the co-founder of a medical imaging device company, OcuBell Inc. Mr. de la Zerda studied Computer Engineering and Physics at the Technion ? Israel Institute of Technology where he graduated with a B.Sc. Summa Cum Laude. From jwc at snf.stanford.edu Wed Apr 14 10:19:56 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 14 Apr 2010 09:19:56 -0800 Subject: [POSSIBLE VIRUS:###] [Fwd: Tiberio is looking for thin dielectric on Silicon] Message-ID: <1563_1271261916_4BC5EADC_1563_418303_1_4BC5F93C.3080209@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- An embedded message was scrubbed... From: "Richard Tiberio" Subject: Tiberio is looking for thin dielectric Date: Mon, 12 Apr 2010 14:32:28 -0700 Size: 9895 URL: From jrgdavid at stanford.edu Thu Apr 15 12:22:48 2010 From: jrgdavid at stanford.edu (Rakesh) Date: Thu, 15 Apr 2010 12:22:48 -0700 Subject: Fwd: Stanford Vacuum Training-Tuesday, April 20th @ 1pm References: Message-ID: <3DCF5630-EE30-4F8D-B46C-BDB67511AA77@stanford.edu> Begin forwarded message: > From: "Peggy Loche" > Date: April 15, 2010 12:20:07 PM PDT > To: , "Neil Dasgupta" , > "Shuang Li" , "Felix Schmitt" > > Cc: , , >, "Samuel Rosenthal" , "Chia-Jung Chung" >, , , "Rungthiwa > Methaapanon" , "Robert Hammond" >, "James Mack" , "Xinyu Bao" > > Subject: Stanford Vacuum Training-Tuesday, April 20th @ 1pm > > > > Lesker will be holding our free vacuum training seminar at Stanford > University on Tuesday, April 20th, see attached outline. You are > welcome to attend and it is free of charge so please share this info > with others as I simply ask anyone planning to attend to RSVP so I > can make appropriate arrangements for beverages and snacks. > > Shawn Jones > Rakesh Gnana David J PhD Candidate Stanford University, CA Phone: +1 408 421 4943 e-mail: jrgdavid at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Stanford_VACUUM TRAINING SEMINAR_04-20-10.doc Type: application/msword Size: 29696 bytes Desc: not available URL: -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Stanford_Map - Braun Auditorium in Mudd Chemistry_2010.pdf Type: application/pdf Size: 1058513 bytes Desc: not available URL: -------------- next part -------------- An HTML attachment was scrubbed... URL: From dasgupta at stanford.edu Thu Apr 15 13:16:13 2010 From: dasgupta at stanford.edu (Neil Dasgupta) Date: Thu, 15 Apr 2010 13:16:13 -0700 (PDT) Subject: Vacuum Training Seminar Tuesday, April 20 In-Reply-To: Message-ID: <138340016.5729511271362573599.JavaMail.root@zm03.stanford.edu> Dear Labmembers, Kurt J. Lesker Co. is giving a vacuum training seminar this coming Tuesday, April 20. It is from 1-4 PM in Braun Auditorium in Mudd Chemistry Building. It will cover: Gas-Solid Interactions Basic Pumping Concepts Gas Load Throughput Equating Gas Load and Throughput Vacuum System Modeling Please feel free to forward this to any lists you are on, as it should be very informative. Refreshments will be provided. For any questions, contact Shawn Jones, shawnj at lesker.com , 209-401-6453. Thanks! James Mack jfmack at stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: Stanford_VACUUM TRAINING SEMINAR_04-20-10.pdf Type: application/pdf Size: 87857 bytes Desc: not available URL: From shott at stanford.edu Fri Apr 16 08:15:11 2010 From: shott at stanford.edu (John Shott) Date: Fri, 16 Apr 2010 08:15:11 -0700 Subject: Updating Java and Acrobat reader .... Message-ID: <4BC87EFF.8090507@stanford.edu> SNF Lab Members: The folks that distribute malware have apparently begun to exploit both Java run from within a browser and Adobe Acrobat Reader to download unwanted software onto your machines. While this does not affect Remote Coral in any way, if you do not have the latest versions of Java and Acrobat Reader installed on your desktop machines and laptops, you could be at risk when visiting other web sites or opening PDF documents. On Windows machines, if you open up your control panel, you should have an icon for Java. If you open that, it will have a tab named Update and on that panel is a button named "Update Now" which will download and install the latest Java Runtime Environment 1.6.0_20. Note: this may also offer to install either a Yahoo menu bar and a backup product named Carbonite .... and, I think, pre-checks those check boxes. If you don't want to install these things, make sure that you look at and read each page rather than blindly clicking "Next". In Adobe Reader, if you get a pop up window labeled "Launch File" that claims that it wants to launch an application from a PDF document, be careful. This may be a bad guy trying to download something undesirable onto your machine. More details about these threats are at: http://krebsonsecurity.com/2010/04/java-patch-targets-latest-attacks/ Note: for Mac users, I don't know whether Apple has released a version of their JRE to thwart these threats. Thanks, John From rissman at stanford.edu Mon Apr 19 08:09:21 2010 From: rissman at stanford.edu (Paul Rissman) Date: Mon, 19 Apr 2010 08:09:21 -0700 Subject: Fwd: New Frontiers in Plasma Nanopatterning Workshop - Register Today Message-ID: <20100419150924.712C137D54@smtp-roam.stanford.edu> >Delivered-To: rissman at snf.stanford.edu >From: "Molecular Foundry" >To: "rissman at snf.stanford.edu" >Reply-To: nancy.crouch at oxinst.com >Date: Mon, 19 Apr 2010 14:00:22 +1000 >Subject: New Frontiers in Plasma Nanopatterning Workshop - Register Today >X-Mailer: createsend.com >X-Complaints-To: abuse at createsend.com >List-Unsubscribe: > >The >Molecular Foundry >April 12, 2010 >Foundry > > >July 15-16, 2010 at The Molecular Foundry of LBNL > > > >Thursday, July 15: 8am - 5:30pm >Friday July 16: 8:30am - 12:30pm > >This two-day seminar, sponsored by The Molecular >Foundry and Oxford Instruments Plasma Technology >is free of charge, but must be booked in advance >as spaces are limited. >Click here to book your place. > >View the >preliminary >program. > >Presentations by key speakers include: > * The future of nanoelectronics > * ALD in solar cells and direct-write patterning > * Pt ALD > * Inorganic resists for high speed, high resolution patterning > * Advanced plasma diagnostics and links to on-wafer performance > >Workshops and classes include: > * Intros to ALD/PECVD, Plasma diagnostics, and Nanofabrication & etching > * Plasma based etching and atomic layer deposition > * Nanofab tour > >There will also be tours of The Molecular >Foundry, a poster session, and a Process >Helpdesk, at which Oxford Instruments process >experts will be on hand to answer any specific Process Application questions. > >Register today >to reserve your seat. Space is limited, so early booking is advisable. >Foundry > > > > > > > > > >A U.S. Department of Energy National Laboratory >Operated by the University of California > >UC logo > >Questions >& Comments ? >Privacy >& Security Notice > >This email was sent to rissman at snf.stanford.edu. >You can instantly unsubscribe from these emails >by >clicking here. -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Mon Apr 19 08:11:40 2010 From: mtang at stanford.edu (Mary Tang) Date: Mon, 19 Apr 2010 08:11:40 -0700 Subject: Process Clinic Today, 2-3:30 pm Message-ID: <4BCC72AC.8090004@stanford.edu> Greetings labmembers -- Just a reminder that there is a Process Clinic today (Monday) from 2-3:30 pm in the cubicle area outside of Maureen's office. Experienced people will be on hand to answer questions and brainstorm ideas to address process issues. Bring your ideas, process questions, your process runsheets, SpecMat request, device layouts, and whatever else. (Senior labmembers are most welcome to help advise!) Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From jiazhu at stanford.edu Fri Apr 23 10:14:33 2010 From: jiazhu at stanford.edu (Jia Zhu) Date: Fri, 23 Apr 2010 10:14:33 -0700 (PDT) Subject: Reminder: EE PhD Oral Defense - Jia Zhu, Monday, April 26, 2010; 4-6pm, CIS-X Auditorium In-Reply-To: <1818030179.803551272042756762.JavaMail.root@zm01.stanford.edu> Message-ID: <1346864145.804021272042873361.JavaMail.root@zm01.stanford.edu> Stanford University Ph.D. Dissertation Defense Name: Jia Zhu Advisor: Prof. Yi Cui Time: April 26 (Monday: 4pm-6pm) Location: CIS-X Auditorium Title: Tuning the Shape of Semiconductor Nanowires for Advanced Photovoltaics Abstract: Tuning the shape of nanostructures can have a strong effect on photon management and charge carrier collection for photovoltaics. Here, I demonstrate two examples of nanowire shape designing: nanocones and branched nanowires. Photon management, involving both absorption enhancement and reflection reduction, is critical to all photovoltaic devices. It can improve the efficiency by minimizing optical and electrical losses, and cut cost by reducing material usage, process time and capital investment. Here I demonstrate a novel solar cell structure with an efficient photon management design. The centerpiece of the design is a novel nanocone structure, which is fabricated by a scalable low temperature process. With this design, devices with very thin active layer can achieve near perfect absorption because of both efficient antireflection and absorption enhancement over a broad spectral range and a wide range of angles of incidence. More strikingly, the design and process is not in principle limited to any specific material system, hence it opens up exciting opportunities for all classes of photovoltaic devices. I have used amorphous silicon and dye sensitized solar cells as two examples to demonstrate the concept. The device efficiencies of this design are significantly better compared to conventional devices. Moreover, I also have explored absorption enhancement on a sub-wavelength scale, compared to ?classical? light trapping limits. PbSe nanocrystals have shown a greatly enhanced multi exciton generation (MEG) effect, one important step toward third generation solar cells. However, it is difficult to extract generated carriers from nanocrystals without good transport pathways. Three dimensional branched nanowire or nanotube networks, with strong quantum confinement within two dimensions, and the connected third dimension as an efficient charge carrier pathway, could be ideal for enhancing the MEG effect, light absorption, and carrier collection. I successfully demonstrate a large area growth of PbSe hyperbranced and chiral branched nanowires on a variety of substrates. More excitingly, Chiral branched nanowires reveal a new nanowire growth mechanism, dislocation driven growth, which can be applied to a variety of materials. From shibingw at stanford.edu Fri Apr 23 14:44:04 2010 From: shibingw at stanford.edu (Shibing Wang) Date: Fri, 23 Apr 2010 14:44:04 -0700 Subject: silicone oil Message-ID: <4BD214A4.7060208@stanford.edu> Hi, I wonder if any of your lab has chemically pure silicone oil. I'd like to use a small amount of 5ml as pressure transmitting medium in diamond cell. Thank you, Shibing -- Shibing Wang Ph.D. Candidate Department of Applied Physics Stanford University 316 Via Pueblo Mall Department of Applied Physics Stanford, CA, 94305 Tel: 650 862 3001 From dpb167 at stanford.edu Sun Apr 25 12:33:59 2010 From: dpb167 at stanford.edu (David Paul Bernstein) Date: Sun, 25 Apr 2010 12:33:59 -0700 Subject: clean up after yourself in the gowning area! Message-ID: Dear Labmembers, Why is it necessary to make a mess of the table with the gloves, leave the booties strewn all over with the baskets tipped over and leave your clothes hangers lying all over the place? It kind of makes me embarrassed to be a labmember. Please straighten up after yourself so that someone else doesnt have to (I just did). Dave -------------- next part -------------- An HTML attachment was scrubbed... URL: From mehdij at stanford.edu Mon Apr 26 12:10:02 2010 From: mehdij at stanford.edu (Mehdi Javanmard) Date: Mon, 26 Apr 2010 12:10:02 -0700 Subject: SU-8 10 Message-ID: Hi all, I was wondering if anybody has any SU-8 10 and if they would mind letting me borrow a few ml. I'm not sure if it will help me solve my processing issue or not, and I wanted to test the process once before buying a whole bottle. thanks, Mehdi -- Mehdi Javanmard, PhD Engineering Research Associate Stanford Genome Technology Center 909-438-6864 mehdij at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From popomoo at stanford.edu Mon Apr 26 14:53:12 2010 From: popomoo at stanford.edu (SangMoo Jeong) Date: Mon, 26 Apr 2010 14:53:12 -0700 Subject: spin-on-glass Message-ID: Hi, labmembers. I'm planning to use spin-on-glass with <100nm thickness. But, I don't have any experience for this material. If anyone of you have experience in using spin-on-glass or have some samples, please let me know. Thanks. -- Sangmoo Jeong Graduate student Department of Electrical Engineering Stanford University Email: popomoo at gmail.com Phone: 650-704-3295 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jaehlee at stanford.edu Mon Apr 26 23:16:03 2010 From: jaehlee at stanford.edu (Jae Hyung Lee) Date: Mon, 26 Apr 2010 23:16:03 -0700 Subject: [Reminder] Seminar: Adam de la Zerda, Tuesday, April 27, 4:00-5:00pm, Allen 101X Auditorium In-Reply-To: References: Message-ID: Photoacoustic Molecular Imaging and its Biomedical Applications Adam de la Zerda Stanford University, Department of Electrical Engineering and the Molecular Imaging Program Abstract: Photoacoustic imaging is a new medical imaging field with tremendous clinical and commercial potential. In this talk, I will show how we utilize the 'photoacoustic effect' - the conversion of short light pulses into ultrasound waves, for performing highly sensitive disease detection in a living body. By measuring the ultrasound waves emanating from the body, one can create a detailed 3D image of the blood vessels structure, oxygen saturation levels and track external contrast agent molecules as they target diseased tissues such as cancer. I will present our experimental photoacoustic imaging system, reviewing its various aspects including: optics, electronics, ultrasound, image processing, nanoparticle chemistry, biology and medicine. ?Finally, a number of medical needs we attempt to solve using this technology will be introduced, including cancer, eye diseases, and lymphatic diseases. Biography: Adam de la Zerda is a Ph.D. candidate at the Dept. of Electrical Engineering at Stanford. He works on Photoacoustic Molecular Imaging and its application for ophthalmic and cancer imaging under the mentorship of Prof. Sanjiv Sam Gambhir at the Radiology and Bioengineering departments at Stanford University. Mr. de la Zerda has received over 14 awards for his work including the Best Poster Presentation at SPIE Photonics West (2009), the Young Investigator Award at the World Molecular Imaging Congress (2008), the Department of Defense Breast Cancer Research Program Award for Predoctoral researchers (2008), the Bio-X Graduate Student Fellowship (2008), and first place at the Bay Area Entrepreneurship Contest (2007). He has published over 10 papers in leading journals including Nature Nanotechnology, Nano Letters, and PNAS, some of which received significant press coverage from Forbes Magazine, US News and The Washington Post. He holds a number of patents and is the co-founder of a medical imaging device company, OcuBell Inc. Mr. de la Zerda studied Computer Engineering and Physics at the Technion ? Israel Institute of Technology where he graduated with a B.Sc. Summa Cum Laude. From mtang at stanford.edu Tue Apr 27 09:40:51 2010 From: mtang at stanford.edu (Mary Tang) Date: Tue, 27 Apr 2010 09:40:51 -0700 Subject: ASM Epi1 Move: Thursday, 4/29 Message-ID: <4BD71393.1090102@stanford.edu> Dear labmembers: The ASM Epi system (otherwise known as epi or epi1) will be moved from the lab this Thursday, April 29, starting at about 7 am. Preparations are underway now for this move, which should take only a couple of hours. Please be warned that the white area of the cleanroom will be breached during the move (the double doors next to the chemicals passthrough will be opened), but that we expect the cleanroom to recover quickly afterwards. You may want to plan your lab activities accordingly. This move marks the end of an era at SNF... The ASM Epsilon was commissioned here around 1987 as an atmospheric epitaxial deposition system, the first to our knowledge at any University lab. After significant modification, it was soon converted to a prototype sub-atmospheric system. Pioneering process development work was done on this system: Ge and SiGe on silicon devices, conformal poly encapsulation for packaging, hydrogen annealing of silicon. The methods developed on this system have launched many dozens of PhD's, not to mention at least one successful company. However, the decades take their toll and it became increasingly difficult to maintain this system, particularly with is one-of-a-kind modifications. With the introduction of epi2, ASM Epi is no longer the critical path step it once was. Once the ASM Epi departs this world, its space will be prepped for the installation of two new PECVD systems, due in August (for more information about these, see the News on the SNF website.) And in the meantime, strategic discussions are underway to further increase epitaxial deposition capacity and capability at SNF. So, it's the end of an era -- but the beginning of a new one, as we embark on introducing new equipment and processes at SNF. If you have any questions about the move or new equipment, please contact any of us -- Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From edfei at stanford.edu Tue Apr 27 13:16:31 2010 From: edfei at stanford.edu (Ed Fei) Date: Tue, 27 Apr 2010 13:16:31 -0700 Subject: SOI wafers Message-ID: Hey Everybody, Does anyone have any recommendations for vendors to buy SOI wafers? I am looking for 4" wafers with a device layer of 200-300nm thickness. Thanks! Ed From liangjl at stanford.edu Tue Apr 27 21:05:44 2010 From: liangjl at stanford.edu (Jiale Liang) Date: Tue, 27 Apr 2010 21:05:44 -0700 (PDT) Subject: Fga2 Furnace Abuse In-Reply-To: <834538161.8450541272427458768.JavaMail.root@zm03.stanford.edu> Message-ID: <1431446278.8450841272427544203.JavaMail.root@zm03.stanford.edu> Hi, Professor Howe, Professor Wong, Mary, and Nancy. I enabled my fga2 around 15:30pm and I have reserved the tool for a long time annealling till next day. I adjusted my temperature to 400C, put my wafer into the furnace and left SNF around 17:30. However, when I came back 2 hours after, I was surprised to see the door of the furnace is fully open, the quartz cap is put on the desk beside and the temperature shows only 267C. Everyone knows the fga2 is a manual-controlled furnace and the wafers can be directly seen through the door. It is hard to believe someone opened the door, pulled out the quartz cap and adjusted the temperature setting UNINTENTIONALLY. Even if the labmember opened the furnace by mistake without checking the Coral first, they should not leave the quartz tube uncapped, the door open, and the temperature adjusted. Since I came with the furnace fully open without any message left around the tool, it makes me feel extremely unsafe in this lab and cannot trust my samples any more. The failure of this step ruins all my previous work and costs me tens of hours to start again. I hope people can respect others' work and instrument reservation. Please let me know who operated that furnace during that period. I will really appreciate that. Best, Jiale From tberg at stanford.edu Wed Apr 28 07:27:23 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 28 Apr 2010 07:27:23 -0700 Subject: RTPs and other brief disruptions Message-ID: <4BD845CB.3070709@stanford.edu> Hello All, As most of you know things are improving in the lab. In the process of installing new tools i.e. we will need to shut down RTAGAAS for a period of about a week. This will begin on June 1st. During this time STS dep will have certain gases shut down for brief periods to tie in gas lines. Hopefully this will give users ample notice to plan ahead. We apologize for the disruption but know we are making the lab more versatile for all of you. Thanks in advance for your cooperation. From edmyers at stanford.edu Wed Apr 28 09:17:14 2010 From: edmyers at stanford.edu (Ed Myers) Date: Wed, 28 Apr 2010 09:17:14 -0700 Subject: AppNano AFM Probes Presentation Message-ID: <6.2.5.6.2.20100428090504.050ad6d8@stanford.edu> Stanford Nanofabrication Facility and AFM Lab Member Community, AppNano AFM Probes Technology will be on campus Tuesday, April 4th to give a presentation on their latest probe technology. The presentation will begin at 12 noon in room Paul Allan 101. Please refer to the attached flier for complete details. The presentation will last approximately one hour and will highlight several recent AFM tip technologies and developments. A free lunch will be provided to registered guests. To reserve your pizza lunch and the option of free AFM tip samples please reply to info at appnano.com with your name and contact information (email and phone number) and the AFM probe part number. To request sample probes please visit www.appnano.com and suggest the probe part number you are most interested in obtaining. You may select one part number out of the following series of probes : ACT, ACL, FORT, SHOCON, SICON and HYDRA. For additional information on the presentation please contact: mhuey at appnano.com -------------- next part -------------- A non-text attachment was scrubbed... Name: Applied NanoStructures.docx Type: application/msword Size: 14222 bytes Desc: not available URL: From goldhaber-gordon at stanford.edu Wed Apr 28 13:59:11 2010 From: goldhaber-gordon at stanford.edu (David Goldhaber-Gordon) Date: Wed, 28 Apr 2010 13:59:11 -0700 Subject: Final Notice Stanford Nanoprobes Workshop! - May 14, 2010 Message-ID: April 28, 2010 ? FINAL NOTICE Dear SNF labmembers (feel free to forward to others), You are cordially invited to: Stanford University?s Center for Probing the Nanoscale (CPN) 6th Annual Workshop Friday, May 14, 2010 8:30-6, with continental breakfast and lunch included. Poster session from 4-6, with hors d'oeuvres served. STUDENTS AND POSTDOCS ARE FREE, BUT EVERYONE MUST REGISTER! Registration: Location: Bechtel Conference Center, Encina Hall, 616 Serra Mall, Stanford University. Speakers include: Alexander Balatsky, Los Alamos National Laboratory " Dirac Materials" Irfan Siddiqi, University of California, Berkeley "Noiseless Amplification in Superconducting Nanoscale Magnetometers" Tetsuo Hanaguri, RIKEN Advanced Science Institute, Saitama, Japan " Spectroscopic-Imaging STM at High Magnetic Fields" Ray Ashoori, MIT "Extremely High Energy Resolution Spectroscopy of Two-Dimensional Electronic Systems" Roya Maboudian, University of California, Berkeley "Probing Interfacial Contact via MEMS-based Instrumentation" Wilson Ho, University of California, Irvine "Single Spin Phenomena" David A. Muller, Cornell University "Atomic-Resolution Imaging of the Physical and Electronic Structure of Nano-Devices" Keith Schwab, California Institute of Technology "Exploration of the Quantum Properties of Nanoscale Electro-Mechanical Structures" Andreas Heinrich, IBM "Measuring Spin Relaxation Times of Single Atoms with Nanosecond Time Resolution" ----------------------------------------------------------------- David Goldhaber-Gordon ? ? ? ? ? ? ? ? ? ? ? ? ? ?goldhaber-gordon at stanford.edu Associate Professor of Physics ? ? ? ? ? ? ? ? ?davidg at post.harvard.edu and Deputy Director, ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? (permanent forwarding) Center for Probing the Nanoscale Stanford University www.stanford.edu/group/cpn/ (650) 725-2047 (lab) (650) 724-3709 (office) Address for letters or packages: ? ? ? ? ? ? ? ? ? ? ?Administrative Associate: David Goldhaber-Gordon ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? Roberta Edwards Geballe Laboratory for Advanced Materials ? ? ? McCullough, Rm. 338 McCullough Building, Room 346 ? ? ? ? ? ? ? ? ? ? ?Phone: (650) 723-8028 476 Lomita Mall ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? Fax: (650) 724-3681 Stanford, CA 94305-4045 ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ?email: redward at stanford.edu -- ----------------------------------------------------------------- David Goldhaber-Gordon goldhaber-gordon at stanford.edu Associate Professor of Physics davidg at post.harvard.edu and Deputy Director, (permanent forwarding) Center for Probing the Nanoscale Stanford University www.stanford.edu/group/cpn/ (650) 725-2047 (lab) (650) 724-3709 (office) Address for letters or packages: Administrative Associate: David Goldhaber-Gordon Roberta Edwards Geballe Laboratory for Advanced Materials McCullough, Rm. 338 McCullough Building, Room 346 Phone: (650) 723-8028 476 Lomita Mall Fax: (650) 724-3681 Stanford, CA 94305-4045 email: redward at stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: AdMar5.3.jpg Type: application/octet-stream Size: 155299 bytes Desc: not available URL: From tberg at stanford.edu Thu Apr 29 06:02:49 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 29 Apr 2010 06:02:49 -0700 Subject: Epi Move Message-ID: <4BD98379.8000203@stanford.edu> Hello All, The big day has come. The ASM epi will be leaving today. The schedule is for the tool to leave the lab around 8:00am and be on the truck by 10:00. This means the lab doors will be open for a short period of time as the tool exits. please plan accordingly. Thanks for your understanding and cooperation. ted From mtang at stanford.edu Thu Apr 29 06:21:05 2010 From: mtang at stanford.edu (Mary Tang) Date: Thu, 29 Apr 2010 06:21:05 -0700 Subject: Fga2 Furnace Abuse In-Reply-To: <1431446278.8450841272427544203.JavaMail.root@zm03.stanford.edu> References: <1431446278.8450841272427544203.JavaMail.root@zm03.stanford.edu> Message-ID: <4BD987C1.7010306@stanford.edu> Dear labmembers -- This is your worst lab nightmare. You've just spent a week working on these wafers and they've just been damaged. It's bad enough when it an equipment problem. But it's much worse when an unknown person does it. Jiale's process has a limited thermal budget and because she doesn't know the thermal history now, she has to start over. It seems that it's a habit among some fga2 users to enter recipes and load wafers before even enabling on Coral. Certainly, if this person had tried to enable on Coral, they would have seen that Jiale had it enabled and reserved. Another and bigger mistake was that this person has not gotten back to Jiale about this. So first, a reminder to all: USE Coral PROPERLY! If you are preparing a machine or loading wafers so that no one else can use it, should be enabled by you on Coral BEFORE you begin. You should check the status on Coral and respect reservations. This goes for any tool. Second, another reminder: MISTAKES HAPPEN AND IT'S OK! This is a learning institution so mistakes happen all the time. But we need to be responsible adults and own up to them. Jiale would appreciate an apology. She would really appreciate information which might help her to salvage her wafers -- and if not, perhaps a hand in reprocessing them. When any of us makes a mistake, we should try learn from it. So if anyone has any information that might help, please get in touch. Please also take this as a reminder to use Coral properly and remind others to do so. Thank you for your attention -- Your SNF staff Jiale Liang wrote: > Hi, Professor Howe, Professor Wong, Mary, and Nancy. > > I enabled my fga2 around 15:30pm and I have reserved the tool for a long time annealling till next day. I adjusted my temperature to 400C, put my wafer into the furnace and left SNF around 17:30. However, when I came back 2 hours after, I was surprised to see the door of the furnace is fully open, the quartz cap is put on the desk beside and the temperature shows only 267C. > > Everyone knows the fga2 is a manual-controlled furnace and the wafers can be directly seen through the door. It is hard to believe someone opened the door, pulled out the quartz cap and adjusted the temperature setting UNINTENTIONALLY. Even if the labmember opened the furnace by mistake without checking the Coral first, they should not leave the quartz tube uncapped, the door open, and the temperature adjusted. Since I came with the furnace fully open without any message left around the tool, it makes me feel extremely unsafe in this lab and cannot trust my samples any more. The failure of this step ruins all my previous work and costs me tens of hours to start again. I hope people can respect others' work and instrument reservation. > > Please let me know who operated that furnace during that period. I will really appreciate that. > > Best, > > Jiale > From yu0528 at stanford.edu Fri Apr 30 16:26:17 2010 From: yu0528 at stanford.edu (Chia-Yu Chen) Date: Fri, 30 Apr 2010 16:26:17 -0700 Subject: Reminder: EE PhD Oral Defense - Chia-Yu Chen, Monday, May 3, 2010; 9-11am, CIS-X Auditorium In-Reply-To: <1346864145.804021272042873361.JavaMail.root@zm01.stanford.edu> References: <1818030179.803551272042756762.JavaMail.root@zm01.stanford.edu> <1346864145.804021272042873361.JavaMail.root@zm01.stanford.edu> Message-ID: <007401cae8bc$88b88450$9a298cf0$@edu> Stanford University Ph.D. Dissertation Defense Title: ?Low frequency noise in advanced MOS transistors? Chia?Yu Chen Department of Electrical Engineering Research Advisor: Prof. Robert W. Dutton Date: Monday, May 3rd, 2010 Time: 9:00 am (Refreshments beforehand) Location: CIS?X 101 (Auditorium) Abstract: When scaling down device size and power supply, noise becomes more and more important in the future IC technology. However there are still fundamental issues in low frequency (LF) noise. This talk will address the fundamental mechanism of LF noise in advanced MOSFETs, which includes two parts: (a) Low frequency noise in hetero?MOSFETs: The study starts from LF noise in p?type Si/SiGe/Si buried channel MOSFETs and in standard surface channel p?type MOSFETs. Through the comparison between buried channel and surface channel MOSFETs the effects from surface and from bulk are separated and the detailed LF noise mechanisms in the whole gate bias conditions can be discussed. To clarify the LF noise origin advanced TCAD simulations and noise characterization are used and a complete picture of LF noise mechanism in MOSFETs is provided. (b) Low frequency noise in scaled MOSFETs: In the second part of talk we studied LF noise in scaled MOSFETs. When scaling down the device size to nano?meter level LF noise becomes different and random telegraph noise (RTN) is observed. Through measurements in different gate bias conditions and TCAD simulations a complete picture of LF noise origin in scaled MOSFETs is suggested. This study lays groundwork for device LF noise performance optimization and provides physical insights of LF noise for IC designers. From ahazeghi at stanford.edu Fri Apr 30 15:44:24 2010 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Fri, 30 Apr 2010 15:44:24 -0700 (PDT) Subject: Alternative developer for 3612 Message-ID: <1408267079.9196531272667464615.JavaMail.root@zm03.stanford.edu> Does anyone know if there is an alternative developer for 3612 resist that does not etch ALD Al2O3? Thanks, Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: