Cu ALD or CVD

Rainer Fasching rfasch at stanford.edu
Mon Apr 5 09:50:34 PDT 2010


All:

 

I'm  looking desperately for sources for ALD or CVD copper depositions.
Please let me know, if you know anyone who could help.

 

Thanks,

Rainer

 

 

Rainer Fasching, PhD

Cons. Associate Professor

Department of Mechanical Engineering

Stanford University

 

Mail: 440 Escondido Mall, Bldg. 530, Rm. 220, Stanford, CA 94305-3030

Email: rfasch at stanford.edu

Phone: 415-505-3385

Fax: 650-723-5034

 

 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20100405/1eff6875/attachment.html>


More information about the labmembers mailing list