Cu ALD or CVD

Betty Young bayoung at stanford.edu
Mon Apr 5 11:57:58 PDT 2010


Hi,
I am not sure what is available, but you might try:
http://www.lebowcompany.com/
Good luck, Betty Young


----- Original Message -----
From: "Rainer Fasching" <rfasch at stanford.edu>
To: labmembers at snf.stanford.edu
Sent: Monday, April 5, 2010 9:50:34 AM GMT -08:00 US/Canada Pacific
Subject: Cu ALD or CVD




All: 

  

I’m  looking desperately for sources for ALD or CVD copper depositions. Please let me know, if you know anyone who could help. 

  

Thanks, 

Rainer 

  

  

Rainer Fasching, PhD 

Cons. Associate Professor 

Department of Mechanical Engineering 

Stanford University 

  

Mail: 440 Escondido Mall, Bldg. 530, Rm. 220, Stanford, CA 94305-3030 

Email: rfasch at stanford.edu 

Phone: 415-505-3385 

Fax: 650-723-5034 

  

 



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