Moving new Fiji ALD system into the SNF Friday afternoon

J Provine jprovine at stanford.edu
Fri Apr 9 05:29:58 PDT 2010


Dear labmembers,
Thursday SNF received our new Fiji ALD system from Cambridge NanoTech.
Friday around 1:30-2:30 we will move the tool into SNF through the
doors near the chemical pass through and place it in the recently
cleared space there.

This move should be brief and the fab will only be breached for a
short time, but please be aware if your are planning sensitive work
inthis area around this time.

Thank you.
J and the new equipment team



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