Moving new Fiji ALD system into the SNF Friday afternoon
jprovine at stanford.edu
Fri Apr 9 13:36:15 PDT 2010
there is a delay with getting the system on its wheels for movement into the
fab...it looks likely to still happen today, but definitely not 1:30-2:30
window originally indicated.
On Fri, Apr 9, 2010 at 5:29 AM, J Provine <jprovine at stanford.edu> wrote:
> Dear labmembers,
> Thursday SNF received our new Fiji ALD system from Cambridge NanoTech.
> Friday around 1:30-2:30 we will move the tool into SNF through the
> doors near the chemical pass through and place it in the recently
> cleared space there.
> This move should be brief and the fab will only be breached for a
> short time, but please be aware if your are planning sensitive work
> inthis area around this time.
> Thank you.
> J and the new equipment team
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