Al2O3 etch

Pengyu Fan fanpy839 at stanford.edu
Tue Apr 13 11:52:37 PDT 2010


Hi All,

I need to etch ~20nm of Al2O3 (grown ALD). Does anybody have any experience
of wet etch of such materials? (e.g. etchant, etch rate and etc.)

Thank you so much!

Best,
-- 
Pengyu Fan

PhD Candidate
Materials Science & Engineering
Stanford University
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