Al2O3 etch

Pengyu Fan fanpy839 at
Tue Apr 13 11:52:37 PDT 2010

Hi All,

I need to etch ~20nm of Al2O3 (grown ALD). Does anybody have any experience
of wet etch of such materials? (e.g. etchant, etch rate and etc.)

Thank you so much!

Pengyu Fan

PhD Candidate
Materials Science & Engineering
Stanford University
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