Al2O3 etch

J Provine jprovine at stanford.edu
Tue Apr 13 12:42:29 PDT 2010


Koh will etch al2o3. I'm not sure about etch rate exactly, but it
won't take very long at all to etch 20 nm.
J

On Tuesday, April 13, 2010, Pengyu Fan <fanpy839 at stanford.edu> wrote:
> Hi All,
> I need to etch ~20nm of Al2O3 (grown ALD). Does anybody have any experience of wet etch of such materials? (e.g. etchant, etch rate and etc.)
> Thank you so much!
>
> Best,--
> Pengyu Fan
>
> PhD Candidate
> Materials Science & Engineering
> Stanford University
>
>



More information about the labmembers mailing list