Al2O3 etch

J Provine jprovine at
Tue Apr 13 12:42:29 PDT 2010

Koh will etch al2o3. I'm not sure about etch rate exactly, but it
won't take very long at all to etch 20 nm.

On Tuesday, April 13, 2010, Pengyu Fan <fanpy839 at> wrote:
> Hi All,
> I need to etch ~20nm of Al2O3 (grown ALD). Does anybody have any experience of wet etch of such materials? (e.g. etchant, etch rate and etc.)
> Thank you so much!
> Best,--
> Pengyu Fan
> PhD Candidate
> Materials Science & Engineering
> Stanford University

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