Al2O3 etch

Jim McVittie mcvittie at cis.Stanford.EDU
Tue Apr 13 12:58:43 PDT 2010


Pengyu,

ALD Al2O3 etches in 50:1 HF. I will have to check the rate but I expect 2 
min should enough.  Jim  

On Tue, 13 Apr 2010, J Provine wrote:

> Koh will etch al2o3. I'm not sure about etch rate exactly, but it
> won't take very long at all to etch 20 nm.
> J
> 
> On Tuesday, April 13, 2010, Pengyu Fan <fanpy839 at stanford.edu> wrote:
> > Hi All,
> > I need to etch ~20nm of Al2O3 (grown ALD). Does anybody have any experience of wet etch of such materials? (e.g. etchant, etch rate and etc.)
> > Thank you so much!
> >
> > Best,--
> > Pengyu Fan
> >
> > PhD Candidate
> > Materials Science & Engineering
> > Stanford University
> >
> >
> 

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