Fwd: New Frontiers in Plasma Nanopatterning Workshop - Register Today
Paul Rissman
rissman at stanford.edu
Mon Apr 19 08:09:21 PDT 2010
>Delivered-To: rissman at snf.stanford.edu
>From: "Molecular Foundry" <Do-Not-Reply at lbl.gov>
>To: "rissman at snf.stanford.edu" <rissman at snf.stanford.edu>
>Reply-To: nancy.crouch at oxinst.com
>Date: Mon, 19 Apr 2010 14:00:22 +1000
>Subject: New Frontiers in Plasma Nanopatterning Workshop - Register Today
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><http://molecularfoundry.createsend.com/t/r/l/bwujr/yduikithy/r>The
>Molecular Foundry
>April 12, 2010
>Foundry
>
>
>July 15-16, 2010 at The Molecular Foundry of LBNL
>
>
>
>Thursday, July 15: 8am - 5:30pm
>Friday July 16: 8:30am - 12:30pm
>
>This two-day seminar, sponsored by The Molecular
>Foundry and Oxford Instruments Plasma Technology
>is free of charge, but must be booked in advance
>as spaces are limited.
><mailto:nancy.crouch at oxinst.com>Click here to book your place.
>
>View the
><http://molecularfoundry.createsend.com/t/r/l/bwujr/yduikithy/y>preliminary
>program.
>
>Presentations by key speakers include:
> * The future of nanoelectronics
> * ALD in solar cells and direct-write patterning
> * Pt ALD
> * Inorganic resists for high speed, high resolution patterning
> * Advanced plasma diagnostics and links to on-wafer performance
>
>Workshops and classes include:
> * Intros to ALD/PECVD, Plasma diagnostics, and Nanofabrication & etching
> * Plasma based etching and atomic layer deposition
> * Nanofab tour
>
>There will also be tours of The Molecular
>Foundry, a poster session, and a Process
>Helpdesk, at which Oxford Instruments process
>experts will be on hand to answer any specific Process Application questions.
>
><mailto:nancy.crouch at oxinst.com>Register today
>to reserve your seat. Space is limited, so early booking is advisable.
>Foundry
>
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