EE PhD Oral Exam - Shu-Lu Chen, Monday, August 9, 2010; 1:00pm, CISX Auditorium

Shu-Lu Chen shuluc at
Fri Aug 6 14:05:09 PDT 2010

Stanford University PhD Dissertation Defense 

PhD Candidate : Shu-Lu Chen

Title : Multiple-Materials on Silicon Integration

Research Advisor : Prof. Jim Plummer 

Date : Monday, August 9th,  2010 

Time : 1:00 pm (Refreshments served at 12:45 pm) 

Location : CISX Auditorium (room 101)

Abstract :

The focus of this talk is on the technique of integrating multiple-materials on a silicon platform, including experimental demonstrations, theoretical modeling and its application on simplified device structures for three-dimensional (3D) integration.

In the first part of this talk, single crystal GaAs, GaSb and Ge thin films on top of dielectric layers with bulk silicon substrates are demonstrated using a technique called rapid melt growth. The relationship between stoichiometry and the crystal structure is investigated based on the theoretical phase diagram and the experimental results.

In the second part of this talk, a compact model is derived based on the classical crystallization theory. The results are compared with thermal numerical simulation and experiments to provide comprehensive understanding of the physics behind this process and to further identify the key experimental factor.

In the last part of this talk, a simplified device structure is provided as an application of the thin film growth technique. The simplified structure is compared to the conventional MOSFET structure with focus on their performance and process complexity trade-off for 3D-IC implementation.

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