possible gas leak in AMTetcher?
ytanster at gmail.com
Sun Aug 22 08:06:04 PDT 2010
I noticed that the machine reported a 1cc flow of SF6 when the chamber is
open. The SF6 flow was also detected during operation when the recipe was
set to have a 0 flow of SF6. Does this mean that there is a gas leak? Or
is there something wrong with the flow sensor?
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