possible gas leak in AMTetcher?

Mike Tan ytanster at gmail.com
Sun Aug 22 08:06:04 PDT 2010


I noticed that the machine reported a 1cc flow of SF6 when the chamber is
open.  The SF6 flow was also detected during operation when the recipe was
set to have a 0 flow of SF6.  Does this mean that there is a gas leak?  Or
is there something wrong with the flow sensor?


Regards,

Mike Tan
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