possible gas leak in AMTetcher?
mtang at stanford.edu
Sun Aug 22 08:55:15 PDT 2010
Hi Mike --
It is extremely unlikely that there is actual flow when the chamber is
open as there are gas shutoff valves and interlocks as well as the MFC
to prevent this. However, it is pretty common for the flow sensor zero
to drift. So, this should be OK to continue running presuming that all
other functions are OK. Please make sure to report this on Coral as a
On 8/22/2010 8:06 AM, Mike Tan wrote:
> I noticed that the machine reported a 1cc flow of SF6 when the chamber
> is open. The SF6 flow was also detected during operation when the
> recipe was set to have a 0 flow of SF6. Does this mean that there is
> a gas leak? Or is there something wrong with the flow sensor?
> Mike Tan
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