SIMS profiles of P diffusions

Nahid Harjee nharjee at
Sat Jul 10 14:24:13 PDT 2010

Hi Labmembers,

Do any of you have SIMS profiles of P diffusions performed in our POCl3
furnace (tylan6) in the temperature range 800C - 950C that you would be
willing to share with me? I would like to compare them to SRA profiles I
have to evaluate electrical activation.



Nahid Harjee
Ph.D. Candidate
Electrical Engineering
Stanford University
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