cu etchant

Sonny Vo sonnyvo at
Thu Jul 15 16:26:29 PDT 2010

hi labmembers,
does anyone have a small quantity of cu-wet-etchant to spare? It's 
fairly cheap i was told so i can return it in a few weeks, but i need to 
do a quick test tomorrow or sometimes this weekend.

i need to etch Cu on blue tape with 3612 resist as a protective covering 
after litho. Nitric Acid etches Cu but will also etch away the resist. 
sputtering in mrc is an alternative too, but wet-etch would be cleaner. 
Thank you.


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