EVG Spray Coater update
J Provine
jprovine at stanford.edu
Tue Jul 20 13:30:42 PDT 2010
Hello SNFers:
Many of you already know, but i wanted to get the word out that the evg
spray coater is up and running and documented. everything you should need
to find out if this lovely piece of equipment is right for you can be found
at:
https://snf.stanford.edu/SNF/equipment/optical-photolithography/resist-coat/ev101-spray-coater/evg-101-spray-coater
there you will also find information on getting trained and qualified.
any feedback is welcome.
special thanks to all of the users who have contributed to the early
development of the tool to get it to this point of being ready for the full
user community.
J
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