Monday, 6/7 Chilled Water shutdown ....

John Shott shott at
Fri Jun 4 15:25:03 PDT 2010

SNF Lab Members:

As a number of you know, the pressure of the process chilled water to 
the building has been 20-30 PSI higher than normal because of the 
failure of a component known as the expansion tank.

The chilled water system will be shutdown for a period of several hours 
starting at 7 a.m. next Monday, June 7 in order to replace this 
component.  While this is being done, valves will be added to the system 
so that future changes could take place without shutting the entire system.

We apologize for this inconvenience but hope that first thing Monday 
morning will be a minimal disruption to all of you.  This shutdown 
should not affect wet benches, characterization tools, or most 
lithography equipment (except for the ASML).  Most etchers, deposition 
tools, furnaces, and LPCVD tools WILL be unavailable during this time 

Please let us know if you have any questions or concerns.



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