Cooling water back on .... turning tools back on.

John Shott shott at stanford.edu
Mon Jun 7 10:41:17 PDT 2010


SNF Lab Members:

The work on the process cooling water system has been completed and 
process tools are coming back on line.  Please keep an eye on specific 
tools to see when they are returned to service.

A number of tools are already back in service.  Tools with cryopumps 
(such as innotec and metallica) will require a regen of their pumps and 
will take longer to return to service.

Let us know if you have any questions.  Thank you for your continued 
support,

John




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