Cooling water back on .... turning tools back on.
shott at stanford.edu
Mon Jun 7 10:41:17 PDT 2010
SNF Lab Members:
The work on the process cooling water system has been completed and
process tools are coming back on line. Please keep an eye on specific
tools to see when they are returned to service.
A number of tools are already back in service. Tools with cryopumps
(such as innotec and metallica) will require a regen of their pumps and
will take longer to return to service.
Let us know if you have any questions. Thank you for your continued
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