STS nitride recipe

Jim McVittie mcvittie at cis.Stanford.EDU
Mon Mar 1 11:27:00 PST 2010


The SNF has just ordered a low temperature PECVD system from Plasma-Therm
which deposits nitride at below 100C using N2 with SiH4. The Tool will be
delivered in June. It also has a low temp oxide dep process.


On Mon, 1 Mar 2010, Tracy Fung wrote:

> Does anyone have experience with recipes for silicon nitride using STS
> PECVD?  
> I'm currently using the standard ammonia recipe, are there any other
> standard recipes that uses nitrogen?
> Tracy Fung

James (Jim) P. McVittie, Ph.D.	        Sr. Research Scientist 
Paul G. Allen Building                  Electrical Engineering
Stanford Nanofabrication Facility       jmcvittie at
Stanford University             	Office: (650) 725-3640
Rm. 336X, 330 Serra Mall		Lab: (650) 721-6834
Stanford, CA 94305-4075			Fax: (650) 723-4659 

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