STS nitride recipe

Robin King robinhmb at yahoo.com
Mon Mar 1 12:10:00 PST 2010


Can someone tell us the expected date for it to be installed, characterized and available to users?  That would be useful info, thanks. 

--- On Mon, 3/1/10, Jim McVittie <mcvittie at cis.Stanford.EDU> wrote:

> From: Jim McVittie <mcvittie at cis.Stanford.EDU>
> Subject: Re: STS nitride recipe
> To: "Tracy Fung" <tfung at silexos.com>
> Cc: labmembers at snf.stanford.edu
> Date: Monday, March 1, 2010, 11:27 AM
> Tracy,
> 
> The SNF has just ordered a low temperature PECVD system
> from Plasma-Therm
> which deposits nitride at below 100C using N2 with SiH4.
> The Tool will be
> delivered in June. It also has a low temp oxide dep
> process.
> 
>     Jim 
> 
> On Mon, 1 Mar 2010, Tracy Fung wrote:
> 
> > Does anyone have experience with recipes for silicon
> nitride using STS
> > PECVD?  
> > 
> > I'm currently using the standard ammonia recipe, are
> there any other
> > standard recipes that uses nitrogen?
> > 
>> > 
> > Tracy Fung
> > 
>> > 
> > 
> 
> -- 
> --------------------------------------------------------------
> James (Jim) P. McVittie, Ph.D.     
>       Sr. Research Scientist 
> Paul G. Allen Building         
>         Electrical Engineering
> Stanford Nanofabrication Facility   
>    jmcvittie at stanford.edu
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>        Office: (650) 725-3640
> Rm. 336X, 330 Serra Mall   
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> 
> 
> 



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