Boron predeposition in Tylan5

Lele Wang lelewang at stanford.edu
Wed Mar 3 14:37:45 PST 2010


Hi all,
Has anyone used tylan5 for predeposition of boron and measured the right sheet resistance? I did a predeposition at 1000 degree for 30 minutes, but get an unexpected high sheet resistance, about 800 OHMS/SQ. Then I did a dry oxidation at 900 degree for 30 minutes and did a BOE etching for 1 minute, but the resistance is still high, about 800 OHMS/SQ, should be less than 100 OHMS/SQ. What are the right steps before measure the resistance? Thanks.

Best,
Lele



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