Dedicated Wafer Cassette use in SNF

Mary Tang mtang at
Thu Mar 25 17:01:06 PDT 2010

Dear Labmembers:

It has been brought to our attention that some people need to be 
reminded of the policies on dedicated cassettes:

1.  No litho cassettes may be taken into the white area of the lab.  
This includes the metal boats as well as the teflon cassettes with brown 

2.  No Furnace preclean or etch cassettes from clean or semiclean 
stations may be taken into the Litho area of the lab.   This includes 
metal cassettes.

3.  To move wafers between the white and litho areas of the lab, use 
your own transfer cassettes.

4.  If you remove a dedicated cassette from a station (for example, from 
wbdiff to a furnace for loading) return it as soon as possible.

These policies are covered in wet bench training at all these stations.  
If you need a refresher, refer to the training materials in the website 
(procedures on the wiki, video at  If everyone is diligent 
about proper cassette use, the cleanliness in the lab can be better 
maintained and there should be sufficient cassettes for everyone's use.  
If you see someone improperly using dedicated cassettes, you have every 
right to correct that person.  You may also report to staff (please 
provide specific details.)

Thanks for your attention --

Your SNF Staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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