Cr etchant: etching rate?

Kyunghoae Koo koo1028 at stanford.edu
Mon Mar 29 10:27:12 PDT 2010


 

Dear Labmembers, 

 

What is the etching rate of Cr etchant in snf? I need to etch 2nm buffer Cr
layer. Lateral etching is not a big issue. How much time will be enough for
that?

Thanks 

 

Kyunghoae

 

 

===========================================================

Kyung-Hoae Koo

PhD candidate 

Stanford University 

EE department

 

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