Friday Fab Disruption for tool move in

Ed Myers edmyers at stanford.edu
Thu Oct 14 10:37:46 PDT 2010


All,

There will be traffic in the Clean Room as we move in the new sputter 
and ebeam system.  The systems are scheduled to arrive mid-morning on 
Friday, Oct. 15th.  By the time they are off-loaded and uncrated, it 
will be closer to the lunch hour when they move through the fab.  The 
systems will enter through the double doors facing shipping and 
receiving, move past the AG4100, AG4108, past the P5000, making a 
turn past the TEL and the Innotec to their final location near the LAM etcher.

Please be aware of the disruption and plan accordingly.

Regards,
SNF Staff




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