Friday Fab Disruption for tool move in
edmyers at stanford.edu
Thu Oct 14 10:37:46 PDT 2010
There will be traffic in the Clean Room as we move in the new sputter
and ebeam system. The systems are scheduled to arrive mid-morning on
Friday, Oct. 15th. By the time they are off-loaded and uncrated, it
will be closer to the lunch hour when they move through the fab. The
systems will enter through the double doors facing shipping and
receiving, move past the AG4100, AG4108, past the P5000, making a
turn past the TEL and the Innotec to their final location near the LAM etcher.
Please be aware of the disruption and plan accordingly.
More information about the labmembers