Question on Pd Wet Etching

Woo Shik Jung alsune at
Mon Oct 25 15:02:01 PDT 2010

Dear labmembers,

I’ve found that Pd dissolves in HCl:HNO3 (3:1) in hot. Anybody knows about
more detail on this, for example exact temperature and etch rate?




Kyung-Hoae Koo

PhD candidate

Stanford University

EE department
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