Question on Pd Wet Etching

[Woo Shik Jung]

Dear labmembers,



I’ve found that Pd dissolves in HCl:HNO3 (3:1) in hot. Anybody knows about
more detail on this, for example exact temperature and etch rate?



Thanks



Kyunghoae



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Kyung-Hoae Koo

PhD candidate

Stanford University

EE department
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