TiO2 etching

lianglia at stanford.edu lianglia at stanford.edu
Fri Oct 29 15:18:20 PDT 2010


Dear All,

Good afternoon!

Does anyone have experience in etching TiO2 (wet etching) ? Could you let me know about the solution you choose and the approximate etching rate?

Thanks a lot !

Sincererly yours,
Liangliang Zhang
------------------------------------------------------------ 
Ph.D. Candidate
School of Electrical Engineering
Stanford University
CA 94305, U.S.
Tel: 01-609-528-4962

M.S.
Institute of Microelectronics,
Peking University

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