TiO2 etching

[lianglia at stanford.edu]

Dear All,

Good afternoon!

Does anyone have experience in etching TiO2 (wet etching) ? Could you let me know about the solution you choose and the approximate etching rate?

Thanks a lot !

Sincererly yours,
Liangliang Zhang
------------------------------------------------------------ 
Ph.D. Candidate
School of Electrical Engineering
Stanford University
CA 94305, U.S.
Tel: 01-609-528-4962

M.S.
Institute of Microelectronics,
Peking University

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/labmembers/attachments/20101029/0b2ab9bf/attachment.html>