Poor resist adhesion to Ruthenium

Arunanshu Roy amroy at stanford.edu
Fri Apr 1 23:34:44 PDT 2011


Hi labmembers,

Does anyone have suggestions on improving SPR3612 resist adhesion to Ruthenium? I tried spinning the resist after HMDS prime in YES oven at the Laurell resist spinner (5500 rpm for 1um PR). None of the PR remained on most of the samples.
 
Thanks a lot,
Arunanshu



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