Questions about negative PR for photolithography

Pil Sung Jo chovic99 at stanford.edu
Fri Jun 24 14:51:38 PDT 2011


Hi all,

I'd like to use a negative PR for photolithography at SNF.
But, I cannot find proper information about it from labmembers' wiki.
If you know which negative PR is allowed at SNF, please let me know it.
Thanks.

Pil Sung Jo

Ph.D. Candidate
Salleo Research Group
Department of Materials Science & Engineering
Stanford University
Phone : 650-739-3374
E-mail : chovic99 at stanford.edu



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