Drop in Solvent Exhaust
mtang at stanford.edu
Tue Mar 1 21:12:19 PST 2011
Dear labmembers --
For unknown reasons, the litho solvent exhaust system suddenly dropped
in static pressure late this afternoon. No obvious problems were found
and further investigation is planned for early in the morning.
In the meantime, make sure to read the signs over the svgcoat and svgdev
tracks. Local exhaust on the tracks have been adjusted, but not
optimized. So be aware and take extra care to run test wafers, measure,
and inspect them before committing your device wafers. Note that the
ASML is interlocked to the exhaust, so if it drops again, there will be
a corresponding error that is not recoverable until the exhaust is fixed.
Please be aware that solvent exhaust may not be available in the
morning, as Facilities investigates the problem further. Check
equipment status on Coral.
Your SNF staff
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