Drop in Solvent Exhaust

Mary Tang mtang at stanford.edu
Tue Mar 1 21:12:19 PST 2011

Dear labmembers --

For unknown reasons, the litho solvent exhaust system suddenly dropped 
in static pressure late this afternoon.  No obvious problems were found 
and further investigation is planned for early in the morning.

In the meantime, make sure to read the signs over the svgcoat and svgdev 
tracks.  Local exhaust on the tracks have been adjusted, but not 
optimized.  So be aware and take extra care to run test wafers, measure, 
and inspect them before committing your device wafers.  Note that the 
ASML is interlocked to the exhaust, so if it drops again, there will be 
a corresponding error that is not recoverable until the exhaust is fixed.

Please be aware that solvent exhaust may not be available in the 
morning, as Facilities investigates the problem further.  Check 
equipment status on Coral.

Your SNF staff

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